JPS52156299A - High temperature ion irradiating device - Google Patents

High temperature ion irradiating device

Info

Publication number
JPS52156299A
JPS52156299A JP7304376A JP7304376A JPS52156299A JP S52156299 A JPS52156299 A JP S52156299A JP 7304376 A JP7304376 A JP 7304376A JP 7304376 A JP7304376 A JP 7304376A JP S52156299 A JPS52156299 A JP S52156299A
Authority
JP
Japan
Prior art keywords
high temperature
irradiating device
temperature ion
ion irradiating
samples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7304376A
Other languages
Japanese (ja)
Inventor
Kiyoshi Fukaya
Kazuho Sone
Takeo Ariga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute filed Critical Japan Atomic Energy Research Institute
Priority to JP7304376A priority Critical patent/JPS52156299A/en
Publication of JPS52156299A publication Critical patent/JPS52156299A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To irradiate continuously ion beams to the samples by a simple construction and with a least energy consumption by means of setting up movably front and back a rotation panel having plural number of sample holders in a vacuum chamber therein a heating oven connecting to the ion beam path are built in.
COPYRIGHT: (C)1977,JPO&Japio
JP7304376A 1976-06-21 1976-06-21 High temperature ion irradiating device Pending JPS52156299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7304376A JPS52156299A (en) 1976-06-21 1976-06-21 High temperature ion irradiating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7304376A JPS52156299A (en) 1976-06-21 1976-06-21 High temperature ion irradiating device

Publications (1)

Publication Number Publication Date
JPS52156299A true JPS52156299A (en) 1977-12-26

Family

ID=13506934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7304376A Pending JPS52156299A (en) 1976-06-21 1976-06-21 High temperature ion irradiating device

Country Status (1)

Country Link
JP (1) JPS52156299A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914082A (en) * 1972-05-16 1974-02-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914082A (en) * 1972-05-16 1974-02-07

Similar Documents

Publication Publication Date Title
NL7604553A (en) CORPUSCULAR RAY RADIATION GRID MICROSCOPE WITH ENERGY ANALYZER.
JPS5214946A (en) High frequency heating apparatus
JPS52156299A (en) High temperature ion irradiating device
JPS51115342A (en) Solar collector pipe
JPS52134786A (en) Radiation detector
JPS5279548A (en) Heating system utilizing solar energy
JPS51113468A (en) Solid surface processing system
JPS545778A (en) Gas density analyzer
JPS5224585A (en) X-ray analysis apparatus
JPS5379776A (en) Sputtering apparatus
JPS53109475A (en) Manufacture for semiconductor device
JPS52100634A (en) High frequency heater
FR2309810A1 (en) Solar energy heating panel - with extended black coated surface and infra-red radiation reflection
JPS5297443A (en) Glow discharge heating apparatus
JPS53137450A (en) High frequency heating apparatus
JPS51134449A (en) A high-frequency heater
JPS53110138A (en) High frequency wave heating device
JPS52125851A (en) High-frequency heater
JPS51142141A (en) High frequency heater
JPS5317896A (en) Drying method for inside of reactor
JPS536946A (en) High frequency heater
JPS5235340A (en) Solar energy absorbing body
JPS543594A (en) Solid surface element analyzer
ZA783607B (en) Process for the conditioning for storage purposes,of fission products obtained by dry retreatment of irradiated fuels
JPS5225565A (en) Ion inplanter use control plate