JPS641941A - Density distribution pattern for visual inspection of ceramic substrate or the like - Google Patents
Density distribution pattern for visual inspection of ceramic substrate or the likeInfo
- Publication number
- JPS641941A JPS641941A JP15856187A JP15856187A JPS641941A JP S641941 A JPS641941 A JP S641941A JP 15856187 A JP15856187 A JP 15856187A JP 15856187 A JP15856187 A JP 15856187A JP S641941 A JPS641941 A JP S641941A
- Authority
- JP
- Japan
- Prior art keywords
- distribution pattern
- density
- density distribution
- inspected
- ceramic substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE: To detect a steep convex defect at a high accuracy, by providing at least one density gradient at a high density part of a reference density distribution pattern.
CONSTITUTION: The surface of an object to be inspected is irradiated with a reference density distribution pattern of a luminous flux, electromagnetic wave or the like and variation between a detected density distribution pattern and the reference density distribution pattern previously stored is extracted to detect a defect of the object being inspected. Here, the reference density distribution pattern varies in one direction of the object being inspected and has a high density part B at the center portion along the direction of a change in an inspection area, low density parts A and C at a peripheral portion thereof and a density gradient part (a) in an area of the high density part B. When the object being inspected has a steep convex defect, a change in density occurs at the density gradient part (a), thereby enabling highly accurate detection of the steep convex defect.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-158561A JPH011941A (en) | 1987-06-24 | Concentration distribution pattern for visual inspection of ceramic substrates, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-158561A JPH011941A (en) | 1987-06-24 | Concentration distribution pattern for visual inspection of ceramic substrates, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS641941A true JPS641941A (en) | 1989-01-06 |
| JPH011941A JPH011941A (en) | 1989-01-06 |
Family
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