JPS6418743U - - Google Patents

Info

Publication number
JPS6418743U
JPS6418743U JP11357587U JP11357587U JPS6418743U JP S6418743 U JPS6418743 U JP S6418743U JP 11357587 U JP11357587 U JP 11357587U JP 11357587 U JP11357587 U JP 11357587U JP S6418743 U JPS6418743 U JP S6418743U
Authority
JP
Japan
Prior art keywords
substrate
side wall
cassette
utility
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11357587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547472Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987113575U priority Critical patent/JPH0547472Y2/ja
Publication of JPS6418743U publication Critical patent/JPS6418743U/ja
Application granted granted Critical
Publication of JPH0547472Y2 publication Critical patent/JPH0547472Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP1987113575U 1987-07-24 1987-07-24 Expired - Lifetime JPH0547472Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987113575U JPH0547472Y2 (enrdf_load_stackoverflow) 1987-07-24 1987-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987113575U JPH0547472Y2 (enrdf_load_stackoverflow) 1987-07-24 1987-07-24

Publications (2)

Publication Number Publication Date
JPS6418743U true JPS6418743U (enrdf_load_stackoverflow) 1989-01-30
JPH0547472Y2 JPH0547472Y2 (enrdf_load_stackoverflow) 1993-12-14

Family

ID=31353532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987113575U Expired - Lifetime JPH0547472Y2 (enrdf_load_stackoverflow) 1987-07-24 1987-07-24

Country Status (1)

Country Link
JP (1) JPH0547472Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03133152A (ja) * 1989-10-18 1991-06-06 Yodogawa Kasei Kk ガラス基板用カセット
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6133968A (ja) * 1984-07-11 1986-02-18 株式会社日立製作所 運搬具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6133968A (ja) * 1984-07-11 1986-02-18 株式会社日立製作所 運搬具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03133152A (ja) * 1989-10-18 1991-06-06 Yodogawa Kasei Kk ガラス基板用カセット
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット

Also Published As

Publication number Publication date
JPH0547472Y2 (enrdf_load_stackoverflow) 1993-12-14

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