JPS6417387A - Heat treatment device for substrate - Google Patents
Heat treatment device for substrateInfo
- Publication number
- JPS6417387A JPS6417387A JP17243687A JP17243687A JPS6417387A JP S6417387 A JPS6417387 A JP S6417387A JP 17243687 A JP17243687 A JP 17243687A JP 17243687 A JP17243687 A JP 17243687A JP S6417387 A JPS6417387 A JP S6417387A
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- tubular
- heating
- constitution
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Resistance Heating (AREA)
Abstract
PURPOSE:To prevent any heating unevenness from occurring by setting a heating element down to a tubular heating element made up of forming metallic heating material into a porous tubular body, and installing a core pipe in this tubular heating element as its constitution. CONSTITUTION:A heating element 4 is set down to a tubular heating element made up of forming metallic electric heating material into a porous tubular body, and it is constituted in a way of installing a core pipe 2 in this tubular heating element 4. This tubular heating element 4 is of porosity in the peripheral surface, and since a current will not flow at hole parts, a flow of electricity is limited to a part where no hole is formed so that electric resistance becomes higher, therefore heating efficiently takes place. Moreover, the flow of electricity is dispersed in response to the arrangement of holes, whereby generation of heat takes place with a thermal distribution based on the hole arrangement. With this constitution, the peripheral surface is heated by the required thermal distribution, thus any heating unevenness is eliminable, the whole furnace is made into small diametral size and miniaturizable.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17243687A JPS6417387A (en) | 1987-07-09 | 1987-07-09 | Heat treatment device for substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17243687A JPS6417387A (en) | 1987-07-09 | 1987-07-09 | Heat treatment device for substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417387A true JPS6417387A (en) | 1989-01-20 |
Family
ID=15941946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17243687A Pending JPS6417387A (en) | 1987-07-09 | 1987-07-09 | Heat treatment device for substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417387A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009096311A1 (en) * | 2008-01-29 | 2009-08-06 | Tounetsu Corporation | Dip-type heater |
WO2016123738A1 (en) * | 2015-02-02 | 2016-08-11 | 深圳麦克韦尔股份有限公司 | Cigarette heater and heating assembly thereof |
-
1987
- 1987-07-09 JP JP17243687A patent/JPS6417387A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009096311A1 (en) * | 2008-01-29 | 2009-08-06 | Tounetsu Corporation | Dip-type heater |
US8422871B2 (en) | 2008-01-29 | 2013-04-16 | Tounetsu Corporation | Immersion heater |
JP5371784B2 (en) * | 2008-01-29 | 2013-12-18 | 株式会社トウネツ | Immersion heater |
WO2016123738A1 (en) * | 2015-02-02 | 2016-08-11 | 深圳麦克韦尔股份有限公司 | Cigarette heater and heating assembly thereof |
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