JPS6415368A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS6415368A JPS6415368A JP16897787A JP16897787A JPS6415368A JP S6415368 A JPS6415368 A JP S6415368A JP 16897787 A JP16897787 A JP 16897787A JP 16897787 A JP16897787 A JP 16897787A JP S6415368 A JPS6415368 A JP S6415368A
- Authority
- JP
- Japan
- Prior art keywords
- anodes
- film
- opening
- making
- rotary plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16897787A JPS6415368A (en) | 1987-07-07 | 1987-07-07 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16897787A JPS6415368A (en) | 1987-07-07 | 1987-07-07 | Sputtering device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6415368A true JPS6415368A (en) | 1989-01-19 |
JPH0248624B2 JPH0248624B2 (ja) | 1990-10-25 |
Family
ID=15878068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16897787A Granted JPS6415368A (en) | 1987-07-07 | 1987-07-07 | Sputtering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415368A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010090033A (ko) * | 2001-08-14 | 2001-10-18 | 손종역 | 박막의 레이저 증착에서 1축 제어방식의 멀티타겟홀터. |
JP2006219687A (ja) * | 2005-02-08 | 2006-08-24 | Canon Inc | 成膜装置および成膜方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56155981A (en) * | 1980-05-06 | 1981-12-02 | Mitsubishi Electric Corp | Optical encoder |
-
1987
- 1987-07-07 JP JP16897787A patent/JPS6415368A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56155981A (en) * | 1980-05-06 | 1981-12-02 | Mitsubishi Electric Corp | Optical encoder |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010090033A (ko) * | 2001-08-14 | 2001-10-18 | 손종역 | 박막의 레이저 증착에서 1축 제어방식의 멀티타겟홀터. |
JP2006219687A (ja) * | 2005-02-08 | 2006-08-24 | Canon Inc | 成膜装置および成膜方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0248624B2 (ja) | 1990-10-25 |
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