JPS6414197A - Formation of zinc selenide film - Google Patents

Formation of zinc selenide film

Info

Publication number
JPS6414197A
JPS6414197A JP17140387A JP17140387A JPS6414197A JP S6414197 A JPS6414197 A JP S6414197A JP 17140387 A JP17140387 A JP 17140387A JP 17140387 A JP17140387 A JP 17140387A JP S6414197 A JPS6414197 A JP S6414197A
Authority
JP
Japan
Prior art keywords
zinc selenide
selenide
zinc
layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17140387A
Other languages
Japanese (ja)
Inventor
Kazuhiro Okawa
Tsuneo Mitsuyu
Osamu Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17140387A priority Critical patent/JPS6414197A/en
Publication of JPS6414197A publication Critical patent/JPS6414197A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To improve the crystallinity of a zinc selenide film and to increase the light emitting efficiency of a blue light emitting device using the film by forming the zinc selenide film on a gallium arsenide substrate with a prescribed strain superlattice as a buffer layer in-between. CONSTITUTION:The compositional ratio of sulfur in zinc sulfide selenide (ZnSxSe1-x) forming a first layer is regulated to 0.16+ or -0.04. A strain superlattice consisting of zinc sulfide selenide layers in which the compositional ratio of sulfur has been gradually reduced and a zinc selenide layer is formed as a butter layer on a gallium arsenide substrate. Zinc selenide is epitaxial-grown on the buffer layer.
JP17140387A 1987-07-09 1987-07-09 Formation of zinc selenide film Pending JPS6414197A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17140387A JPS6414197A (en) 1987-07-09 1987-07-09 Formation of zinc selenide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17140387A JPS6414197A (en) 1987-07-09 1987-07-09 Formation of zinc selenide film

Publications (1)

Publication Number Publication Date
JPS6414197A true JPS6414197A (en) 1989-01-18

Family

ID=15922505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17140387A Pending JPS6414197A (en) 1987-07-09 1987-07-09 Formation of zinc selenide film

Country Status (1)

Country Link
JP (1) JPS6414197A (en)

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