JPS6412502A - Manufacture of thin film resistor - Google Patents

Manufacture of thin film resistor

Info

Publication number
JPS6412502A
JPS6412502A JP62169004A JP16900487A JPS6412502A JP S6412502 A JPS6412502 A JP S6412502A JP 62169004 A JP62169004 A JP 62169004A JP 16900487 A JP16900487 A JP 16900487A JP S6412502 A JPS6412502 A JP S6412502A
Authority
JP
Japan
Prior art keywords
pattern
thin film
region
oxidation
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62169004A
Other languages
Japanese (ja)
Inventor
Yutaka Taguchi
Kazuo Eda
Tetsuji Miwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62169004A priority Critical patent/JPS6412502A/en
Publication of JPS6412502A publication Critical patent/JPS6412502A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To block the progress of oxidation from the surface and to reduce the change of the value of resistance even in the environment of high temperature and high degree of humidity by a method wherein an electrode to be used for anodic oxidation is provided between a thin film, consisting of tantalum nitride, and a substrate and besides, the whole surface of the thin film resistor is covered by tantalum oxide or an electrode. CONSTITUTION:A covering for anodic oxidation such as Cr-Au, Ni-Cr, Ni-Cr-Au and the like, which become an electrode, is coated on an aluminum substrate 101, and a prescribed pattern 102 is formed using a photolithographic method and the like. Then, tantalum 103 which becomes a resistor is coated on the whole surface, and the pattern contacting the exposed surface of the substrate 101 is formed using the same photolithographic method as above. Subsequently, a resist 104 is provided on the region ranging from the end part of said pattern to the surface of the pattern 103, the region surrounded by the resist 104 is anodic-oxidized by dripping a chromic acid solution 105 of 0.3% thereon, and said region is changed to tantalum oxide. Thus, the progress of oxidation on the surface of the region can be prevented.
JP62169004A 1987-07-07 1987-07-07 Manufacture of thin film resistor Pending JPS6412502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62169004A JPS6412502A (en) 1987-07-07 1987-07-07 Manufacture of thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62169004A JPS6412502A (en) 1987-07-07 1987-07-07 Manufacture of thin film resistor

Publications (1)

Publication Number Publication Date
JPS6412502A true JPS6412502A (en) 1989-01-17

Family

ID=15878559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62169004A Pending JPS6412502A (en) 1987-07-07 1987-07-07 Manufacture of thin film resistor

Country Status (1)

Country Link
JP (1) JPS6412502A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6845823B2 (en) 2001-11-22 2005-01-25 Gtl Co., Ltd. Fluorosurfactant-free foam fire-extinguisher
CN105719783A (en) * 2015-07-23 2016-06-29 中国电子科技集团公司第四十一研究所 Thin-film resistor adjustment device for microwave circuit and adjustment method of thin-film resistor adjustment device
CN112992448A (en) * 2019-12-18 2021-06-18 光颉科技股份有限公司 Thin film resistor element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6845823B2 (en) 2001-11-22 2005-01-25 Gtl Co., Ltd. Fluorosurfactant-free foam fire-extinguisher
CN105719783A (en) * 2015-07-23 2016-06-29 中国电子科技集团公司第四十一研究所 Thin-film resistor adjustment device for microwave circuit and adjustment method of thin-film resistor adjustment device
CN112992448A (en) * 2019-12-18 2021-06-18 光颉科技股份有限公司 Thin film resistor element

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