JPS641226A - Plasma generator - Google Patents
Plasma generatorInfo
- Publication number
- JPS641226A JPS641226A JP15716887A JP15716887A JPS641226A JP S641226 A JPS641226 A JP S641226A JP 15716887 A JP15716887 A JP 15716887A JP 15716887 A JP15716887 A JP 15716887A JP S641226 A JPS641226 A JP S641226A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrons
- magnet
- increased
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To easily discharge, to prevent the discharge from concentrating, and to generate a stable plasma of high plasma density by providing a magnet near one electrode to use a magnetic field, thereby enhancing its ionization efficiency.
CONSTITUTION: A magnet 5 is provided at one electrode 3 of electrodes 2, 3 arranged oppositely in a vacuum vessel 1. The one electrode 3 is normally grounded. A high frequency power supply 7 is connected through a DC blocking capacitor 6 between the other electrode 2 and a ground, and a workpiece 4 to be treated is attached to the other electrode 2. Gas is fed from a gas inlet 9 into the vessel 1, and exhausted from an outlet 8. When a magnet 5 is provided near the one electrode 3, electrons directed toward the electrode is reduced by disturbing the quantity of the electrons which arrive at the electrode due to bending by its magnetic field. Thus, since the number of the electrons between the electrodes 2 and 3 is increased, its ionization efficiency is enhanced to easily discharge. Since the number of the electrons is increased, plasma density is increased.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-157168A JPH011226A (en) | 1987-06-23 | plasma generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-157168A JPH011226A (en) | 1987-06-23 | plasma generator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS641226A true JPS641226A (en) | 1989-01-05 |
JPH011226A JPH011226A (en) | 1989-01-05 |
Family
ID=
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0323627A (en) * | 1989-06-21 | 1991-01-31 | Matsushita Electric Ind Co Ltd | Method and apparatus for plasma doping |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0323627A (en) * | 1989-06-21 | 1991-01-31 | Matsushita Electric Ind Co Ltd | Method and apparatus for plasma doping |
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