JPS6411393U - - Google Patents

Info

Publication number
JPS6411393U
JPS6411393U JP10551287U JP10551287U JPS6411393U JP S6411393 U JPS6411393 U JP S6411393U JP 10551287 U JP10551287 U JP 10551287U JP 10551287 U JP10551287 U JP 10551287U JP S6411393 U JPS6411393 U JP S6411393U
Authority
JP
Japan
Prior art keywords
housing
room
molecular pump
turbo
cooling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10551287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10551287U priority Critical patent/JPS6411393U/ja
Publication of JPS6411393U publication Critical patent/JPS6411393U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP10551287U 1987-07-09 1987-07-09 Pending JPS6411393U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10551287U JPS6411393U (de) 1987-07-09 1987-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10551287U JPS6411393U (de) 1987-07-09 1987-07-09

Publications (1)

Publication Number Publication Date
JPS6411393U true JPS6411393U (de) 1989-01-20

Family

ID=31338194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10551287U Pending JPS6411393U (de) 1987-07-09 1987-07-09

Country Status (1)

Country Link
JP (1) JPS6411393U (de)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
JPS5932697A (ja) * 1982-05-03 1984-02-22 アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− ターボ分子ポンプ用加熱装置および加熱装置を備えたターボ分子ポンプ
JPS6168568A (ja) * 1984-09-12 1986-04-08 Hitachi Ltd 電子冷熱器による低高温ハンドラ−装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
JPS5932697A (ja) * 1982-05-03 1984-02-22 アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− ターボ分子ポンプ用加熱装置および加熱装置を備えたターボ分子ポンプ
JPS6168568A (ja) * 1984-09-12 1986-04-08 Hitachi Ltd 電子冷熱器による低高温ハンドラ−装置

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