JPS6411393U - - Google Patents
Info
- Publication number
- JPS6411393U JPS6411393U JP10551287U JP10551287U JPS6411393U JP S6411393 U JPS6411393 U JP S6411393U JP 10551287 U JP10551287 U JP 10551287U JP 10551287 U JP10551287 U JP 10551287U JP S6411393 U JPS6411393 U JP S6411393U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- room
- molecular pump
- turbo
- cooling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１〜３図は本考案によるターボ分子ポンプの
一実施例を示す図であり、第１図はその側面図、
第２図はその断面図、第３図は電子加熱冷却装置
の拡大構造図である。
１……ターボ分子ポンプ、２……ハウジング、
３……ステータ翼、４……部屋、５……ロータ、
６……ロータ翼、８……ステータコラム、１０…
…駆動電動機、１１……排出ポート、１２……電
子加熱冷却装置、１３……Ｎ型半導体チツプ、１
４……Ｐ型半導体チツプ、１５ａ，１５ｂ……直
流電源、１６……電気伝導物、１８……基板、２
０……直流回路、２１……スイツチ。
1 to 3 are diagrams showing an embodiment of a turbomolecular pump according to the present invention, and FIG. 1 is a side view thereof;
FIG. 2 is a sectional view thereof, and FIG. 3 is an enlarged structural diagram of the electronic heating/cooling device. 1...Turbo molecular pump, 2...Housing,
3...Stator wing, 4...Room, 5...Rotor,
6...Rotor blade, 8...Stator column, 10...
...Drive motor, 11...Exhaust port, 12...Electronic heating and cooling device, 13...N-type semiconductor chip, 1
4... P-type semiconductor chip, 15a, 15b... DC power supply, 16... Electric conductor, 18... Substrate, 2
0...DC circuit, 21...Switch.
Claims (1)
え、このハウジング内の装置を作動させることに
より前記部屋の真空度を高めるターボ分子ポンプ
において、前記ハウジングの周囲に加熱および冷
却いずれも可能な電子加熱冷却装置を配置したこ
とを特徴とするターボ分子ポンプ。 In a turbo-molecular pump that includes a housing connected to a room to be evacuated and increases the degree of vacuum in the room by operating a device inside the housing, an electronic heating and cooling device that can both heat and cool the periphery of the housing. A turbo molecular pump characterized by the arrangement of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10551287U JPS6411393U (en) | 1987-07-09 | 1987-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10551287U JPS6411393U (en) | 1987-07-09 | 1987-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411393U true JPS6411393U (en) | 1989-01-20 |
Family
ID=31338194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10551287U Pending JPS6411393U (en) | 1987-07-09 | 1987-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411393U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
| JPS5932697A (en) * | 1982-05-03 | 1984-02-22 | アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− | Heater for pump and turbo molecular pump with heater |
| JPS6168568A (en) * | 1984-09-12 | 1986-04-08 | Hitachi Ltd | Low/high temperature handler employing electronic cooler |
-
1987
- 1987-07-09 JP JP10551287U patent/JPS6411393U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
| JPS5932697A (en) * | 1982-05-03 | 1984-02-22 | アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− | Heater for pump and turbo molecular pump with heater |
| JPS6168568A (en) * | 1984-09-12 | 1986-04-08 | Hitachi Ltd | Low/high temperature handler employing electronic cooler |
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