FR2747431B1 - Pompe turbomoleculaire a paliers magnetiques actifs - Google Patents

Pompe turbomoleculaire a paliers magnetiques actifs

Info

Publication number
FR2747431B1
FR2747431B1 FR9604658A FR9604658A FR2747431B1 FR 2747431 B1 FR2747431 B1 FR 2747431B1 FR 9604658 A FR9604658 A FR 9604658A FR 9604658 A FR9604658 A FR 9604658A FR 2747431 B1 FR2747431 B1 FR 2747431B1
Authority
FR
France
Prior art keywords
active magnetic
magnetic bearings
motor
support
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9604658A
Other languages
English (en)
Other versions
FR2747431A1 (fr
Inventor
Maurice Brunet
Ulrich Schroeder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe de Mecanique Magnetique SA
Original Assignee
Societe de Mecanique Magnetique SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe de Mecanique Magnetique SA filed Critical Societe de Mecanique Magnetique SA
Priority to FR9604658A priority Critical patent/FR2747431B1/fr
Priority to JP9093587A priority patent/JPH1084694A/ja
Publication of FR2747431A1 publication Critical patent/FR2747431A1/fr
Application granted granted Critical
Publication of FR2747431B1 publication Critical patent/FR2747431B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
FR9604658A 1996-04-15 1996-04-15 Pompe turbomoleculaire a paliers magnetiques actifs Expired - Fee Related FR2747431B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9604658A FR2747431B1 (fr) 1996-04-15 1996-04-15 Pompe turbomoleculaire a paliers magnetiques actifs
JP9093587A JPH1084694A (ja) 1996-04-15 1997-04-11 能動的磁気ベアリングを有するターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9604658A FR2747431B1 (fr) 1996-04-15 1996-04-15 Pompe turbomoleculaire a paliers magnetiques actifs

Publications (2)

Publication Number Publication Date
FR2747431A1 FR2747431A1 (fr) 1997-10-17
FR2747431B1 true FR2747431B1 (fr) 1998-07-03

Family

ID=9491189

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9604658A Expired - Fee Related FR2747431B1 (fr) 1996-04-15 1996-04-15 Pompe turbomoleculaire a paliers magnetiques actifs

Country Status (2)

Country Link
JP (1) JPH1084694A (fr)
FR (1) FR2747431B1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2861142B1 (fr) * 2003-10-16 2006-02-03 Mecanique Magnetique Sa Pompe a vide turbo moleculaire
DE102006041183A1 (de) * 2006-09-01 2008-03-06 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102007044690A1 (de) * 2007-09-19 2009-04-02 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
ITCO20100067A1 (it) * 2010-12-23 2012-06-24 Nuovo Pignone Spa Connessione elettrica per turbomacchina e metodo
FR3018010B1 (fr) * 2014-02-21 2016-03-11 Skf Magnetic Mechatronics Ensemble modulaire de moteur et paliers magnetiques et procede de fabrication
JP6934298B2 (ja) * 2016-12-16 2021-09-15 エドワーズ株式会社 真空ポンプおよび真空ポンプに備わる制御装置
CN113623259B (zh) * 2021-09-06 2023-03-21 杭州氢磁机电科技有限公司 一种磁悬浮轴承支撑的氢气循环泵低温自启动方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421512A (en) * 1977-07-20 1979-02-17 Hitachi Ltd Brake/controller for dc motor
DE3302839A1 (de) * 1983-01-28 1984-08-02 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Turbomolekularpumpe mit induktivitaetsarmem gleichstrommotor, bremseinrichtung und verfahren zum betrieb derselben
JPS60190697A (ja) * 1984-03-09 1985-09-28 Seiko Seiki Co Ltd タ−ボ分子ポンプにおける磁気軸受の制御方式
JPS63206186A (ja) * 1987-02-20 1988-08-25 Matsushita Electric Ind Co Ltd ブラシレス直流モ−タ保護装置
JPS645387A (en) * 1987-06-29 1989-01-10 Yaskawa Denki Seisakusho Kk Ac servo-controller
JP2730206B2 (ja) * 1989-09-01 1998-03-25 松下電器産業株式会社 モータの制御装置
JPH048185A (ja) * 1990-04-25 1992-01-13 Nec Corp 同期電動機の非常停止回路
JP2883225B2 (ja) * 1991-07-10 1999-04-19 三菱電機株式会社 耐熱耐圧形永久磁石同期電動機
IT1250893B (it) * 1991-12-24 1995-04-21 Varian Spa Dispositivo elettronico di frenaggio per motori asincroni.
DE4237971B4 (de) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler
JPH06253523A (ja) * 1993-03-01 1994-09-09 Seiko Seiki Co Ltd Ｄｃブラシレスモータおよびこれを用いたターボ分子ポンプ
JP3368009B2 (ja) * 1993-09-04 2003-01-20 東洋シヤッター株式会社 シャッター駆動用の電動機の駆動制御装置
JP3519771B2 (ja) * 1994-02-28 2004-04-19 Ｎｔｎ株式会社 磁気軸受装置

Also Published As

Publication number Publication date
FR2747431A1 (fr) 1997-10-17
JPH1084694A (ja) 1998-03-31

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20091231