JPS6410946U - - Google Patents
Info
- Publication number
- JPS6410946U JPS6410946U JP10554487U JP10554487U JPS6410946U JP S6410946 U JPS6410946 U JP S6410946U JP 10554487 U JP10554487 U JP 10554487U JP 10554487 U JP10554487 U JP 10554487U JP S6410946 U JPS6410946 U JP S6410946U
- Authority
- JP
- Japan
- Prior art keywords
- container
- chamber
- ion source
- oven
- cooling system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10554487U JPS6410946U (sk) | 1987-07-09 | 1987-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10554487U JPS6410946U (sk) | 1987-07-09 | 1987-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410946U true JPS6410946U (sk) | 1989-01-20 |
Family
ID=31338252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10554487U Pending JPS6410946U (sk) | 1987-07-09 | 1987-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410946U (sk) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246747A (ja) * | 1988-03-29 | 1989-10-02 | Ulvac Corp | イオン源 |
| JPWO2016046939A1 (ja) * | 2014-09-25 | 2017-04-27 | 三菱電機株式会社 | イオン注入装置 |
| JP2017523566A (ja) * | 2014-07-02 | 2017-08-17 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | イオン源の動的温度制御装置 |
-
1987
- 1987-07-09 JP JP10554487U patent/JPS6410946U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01246747A (ja) * | 1988-03-29 | 1989-10-02 | Ulvac Corp | イオン源 |
| JP2017523566A (ja) * | 2014-07-02 | 2017-08-17 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | イオン源の動的温度制御装置 |
| JPWO2016046939A1 (ja) * | 2014-09-25 | 2017-04-27 | 三菱電機株式会社 | イオン注入装置 |
| CN107078005A (zh) * | 2014-09-25 | 2017-08-18 | 三菱电机株式会社 | 离子注入装置 |
| US10043635B2 (en) | 2014-09-25 | 2018-08-07 | Mitsubishi Electric Corporation | Ion implantation apparatus |
| DE112014006989B4 (de) | 2014-09-25 | 2022-12-22 | Mitsubishi Electric Corporation | Ionenimplantierungsvorrichtung |