JPS6410109A - Position detecting device - Google Patents

Position detecting device

Info

Publication number
JPS6410109A
JPS6410109A JP16529787A JP16529787A JPS6410109A JP S6410109 A JPS6410109 A JP S6410109A JP 16529787 A JP16529787 A JP 16529787A JP 16529787 A JP16529787 A JP 16529787A JP S6410109 A JPS6410109 A JP S6410109A
Authority
JP
Japan
Prior art keywords
value
light
reflected light
counted
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16529787A
Other languages
English (en)
Inventor
Hirobumi Kishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16529787A priority Critical patent/JPS6410109A/ja
Publication of JPS6410109A publication Critical patent/JPS6410109A/ja
Pending legal-status Critical Current

Links

JP16529787A 1987-07-03 1987-07-03 Position detecting device Pending JPS6410109A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16529787A JPS6410109A (en) 1987-07-03 1987-07-03 Position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16529787A JPS6410109A (en) 1987-07-03 1987-07-03 Position detecting device

Publications (1)

Publication Number Publication Date
JPS6410109A true JPS6410109A (en) 1989-01-13

Family

ID=15809654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16529787A Pending JPS6410109A (en) 1987-07-03 1987-07-03 Position detecting device

Country Status (1)

Country Link
JP (1) JPS6410109A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009019942A (ja) * 2007-07-11 2009-01-29 Nikon Corp 形状測定方法、プログラム、および形状測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009019942A (ja) * 2007-07-11 2009-01-29 Nikon Corp 形状測定方法、プログラム、および形状測定装置

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