JPS6410066U - - Google Patents

Info

Publication number
JPS6410066U
JPS6410066U JP10182687U JP10182687U JPS6410066U JP S6410066 U JPS6410066 U JP S6410066U JP 10182687 U JP10182687 U JP 10182687U JP 10182687 U JP10182687 U JP 10182687U JP S6410066 U JPS6410066 U JP S6410066U
Authority
JP
Japan
Prior art keywords
electron beam
filament
beam emitting
thin film
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10182687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10182687U priority Critical patent/JPS6410066U/ja
Publication of JPS6410066U publication Critical patent/JPS6410066U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10182687U 1987-07-03 1987-07-03 Pending JPS6410066U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10182687U JPS6410066U (en:Method) 1987-07-03 1987-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10182687U JPS6410066U (en:Method) 1987-07-03 1987-07-03

Publications (1)

Publication Number Publication Date
JPS6410066U true JPS6410066U (en:Method) 1989-01-19

Family

ID=31331172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10182687U Pending JPS6410066U (en:Method) 1987-07-03 1987-07-03

Country Status (1)

Country Link
JP (1) JPS6410066U (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009034717A1 (ja) 2007-09-14 2009-03-19 Daikin Industries, Ltd. 回転式流体機械
AU2007223244B2 (en) * 2006-03-09 2010-02-25 Daikin Industries, Ltd. Refrigeration system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2007223244B2 (en) * 2006-03-09 2010-02-25 Daikin Industries, Ltd. Refrigeration system
WO2009034717A1 (ja) 2007-09-14 2009-03-19 Daikin Industries, Ltd. 回転式流体機械

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