JPS6398627U - - Google Patents
Info
- Publication number
- JPS6398627U JPS6398627U JP19498486U JP19498486U JPS6398627U JP S6398627 U JPS6398627 U JP S6398627U JP 19498486 U JP19498486 U JP 19498486U JP 19498486 U JP19498486 U JP 19498486U JP S6398627 U JPS6398627 U JP S6398627U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- wafer
- predetermined number
- manufacturing
- quartz boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19498486U JPS6398627U (enExample) | 1986-12-17 | 1986-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19498486U JPS6398627U (enExample) | 1986-12-17 | 1986-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398627U true JPS6398627U (enExample) | 1988-06-25 |
Family
ID=31152463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19498486U Pending JPS6398627U (enExample) | 1986-12-17 | 1986-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398627U (enExample) |
-
1986
- 1986-12-17 JP JP19498486U patent/JPS6398627U/ja active Pending