JPS6397454U - - Google Patents
Info
- Publication number
- JPS6397454U JPS6397454U JP1986194094U JP19409486U JPS6397454U JP S6397454 U JPS6397454 U JP S6397454U JP 1986194094 U JP1986194094 U JP 1986194094U JP 19409486 U JP19409486 U JP 19409486U JP S6397454 U JPS6397454 U JP S6397454U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- polishing
- polishing cloth
- cloth
- cleaning brush
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 10
- 239000004744 fabric Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194094U JPS6397454U (zh) | 1986-12-16 | 1986-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194094U JPS6397454U (zh) | 1986-12-16 | 1986-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397454U true JPS6397454U (zh) | 1988-06-23 |
Family
ID=31150744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986194094U Pending JPS6397454U (zh) | 1986-12-16 | 1986-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397454U (zh) |
-
1986
- 1986-12-16 JP JP1986194094U patent/JPS6397454U/ja active Pending