JPS6367243U - - Google Patents
Info
- Publication number
- JPS6367243U JPS6367243U JP16138586U JP16138586U JPS6367243U JP S6367243 U JPS6367243 U JP S6367243U JP 16138586 U JP16138586 U JP 16138586U JP 16138586 U JP16138586 U JP 16138586U JP S6367243 U JPS6367243 U JP S6367243U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- cleaning position
- wafer
- sterilizing
- brush
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000001954 sterilising effect Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 3
- 241000894006 Bacteria Species 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000005201 scrubbing Methods 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16138586U JPS6367243U (zh) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16138586U JPS6367243U (zh) | 1986-10-20 | 1986-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367243U true JPS6367243U (zh) | 1988-05-06 |
Family
ID=31087649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16138586U Pending JPS6367243U (zh) | 1986-10-20 | 1986-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367243U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02109333A (ja) * | 1988-10-18 | 1990-04-23 | Tokyo Electron Ltd | 洗浄装置 |
-
1986
- 1986-10-20 JP JP16138586U patent/JPS6367243U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02109333A (ja) * | 1988-10-18 | 1990-04-23 | Tokyo Electron Ltd | 洗浄装置 |