JPH01149258U - - Google Patents
Info
- Publication number
- JPH01149258U JPH01149258U JP4445088U JP4445088U JPH01149258U JP H01149258 U JPH01149258 U JP H01149258U JP 4445088 U JP4445088 U JP 4445088U JP 4445088 U JP4445088 U JP 4445088U JP H01149258 U JPH01149258 U JP H01149258U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- polishing
- plate
- polished
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 13
- 239000004744 fabric Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 5
- 238000000034 method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4445088U JPH01149258U (zh) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4445088U JPH01149258U (zh) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149258U true JPH01149258U (zh) | 1989-10-16 |
Family
ID=31270805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4445088U Pending JPH01149258U (zh) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149258U (zh) |
-
1988
- 1988-03-31 JP JP4445088U patent/JPH01149258U/ja active Pending