JPS639731B2 - - Google Patents
Info
- Publication number
- JPS639731B2 JPS639731B2 JP57146544A JP14654482A JPS639731B2 JP S639731 B2 JPS639731 B2 JP S639731B2 JP 57146544 A JP57146544 A JP 57146544A JP 14654482 A JP14654482 A JP 14654482A JP S639731 B2 JPS639731 B2 JP S639731B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- alloy
- film resistor
- resistor
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 66
- 239000010409 thin film Substances 0.000 claims description 38
- 229910045601 alloy Inorganic materials 0.000 claims description 33
- 239000000956 alloy Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 24
- 239000010408 film Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 description 10
- 238000000151 deposition Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 229910000599 Cr alloy Inorganic materials 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57146544A JPS5935403A (ja) | 1982-08-23 | 1982-08-23 | Ｎｉ−Ｃｒ薄膜抵抗体の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57146544A JPS5935403A (ja) | 1982-08-23 | 1982-08-23 | Ｎｉ−Ｃｒ薄膜抵抗体の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5935403A JPS5935403A (ja) | 1984-02-27 |
| JPS639731B2 true JPS639731B2 (enExample) | 1988-03-01 |
Family
ID=15410050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57146544A Granted JPS5935403A (ja) | 1982-08-23 | 1982-08-23 | Ｎｉ−Ｃｒ薄膜抵抗体の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5935403A (enExample) |
-
1982
- 1982-08-23 JP JP57146544A patent/JPS5935403A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5935403A (ja) | 1984-02-27 |
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