JPS6397237U - - Google Patents
Info
- Publication number
- JPS6397237U JPS6397237U JP19193786U JP19193786U JPS6397237U JP S6397237 U JPS6397237 U JP S6397237U JP 19193786 U JP19193786 U JP 19193786U JP 19193786 U JP19193786 U JP 19193786U JP S6397237 U JPS6397237 U JP S6397237U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- semiconductor substrate
- conductive layer
- semiconductor device
- penetrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19193786U JPS6397237U ( ) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19193786U JPS6397237U ( ) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397237U true JPS6397237U ( ) | 1988-06-23 |
Family
ID=31146548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19193786U Pending JPS6397237U ( ) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397237U ( ) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005321294A (ja) * | 2004-05-10 | 2005-11-17 | Mitsubishi Electric Corp | 感熱式流量検出素子の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840657A ( ) * | 1971-10-01 | 1973-06-14 | ||
| JPS56153745A (en) * | 1980-04-28 | 1981-11-27 | Nippon Telegr & Teleph Corp <Ntt> | Method for defect evaluation on insulative thin film |
-
1986
- 1986-12-12 JP JP19193786U patent/JPS6397237U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840657A ( ) * | 1971-10-01 | 1973-06-14 | ||
| JPS56153745A (en) * | 1980-04-28 | 1981-11-27 | Nippon Telegr & Teleph Corp <Ntt> | Method for defect evaluation on insulative thin film |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005321294A (ja) * | 2004-05-10 | 2005-11-17 | Mitsubishi Electric Corp | 感熱式流量検出素子の製造方法 |
| JP4515143B2 (ja) * | 2004-05-10 | 2010-07-28 | 三菱電機株式会社 | 感熱式流量検出素子の製造方法 |