JPS639721B2 - - Google Patents
Info
- Publication number
- JPS639721B2 JPS639721B2 JP56156650A JP15665081A JPS639721B2 JP S639721 B2 JPS639721 B2 JP S639721B2 JP 56156650 A JP56156650 A JP 56156650A JP 15665081 A JP15665081 A JP 15665081A JP S639721 B2 JPS639721 B2 JP S639721B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- humidity sensor
- humidity
- conductivity
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 30
- 229920006395 saturated elastomer Polymers 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000004040 coloring Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 241000195955 Equisetum hyemale Species 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002226 superionic conductor Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56156650A JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56156650A JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5857702A JPS5857702A (ja) | 1983-04-06 |
JPS639721B2 true JPS639721B2 (sv) | 1988-03-01 |
Family
ID=15632287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56156650A Granted JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5857702A (sv) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60211347A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
JPS60211348A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
-
1981
- 1981-09-30 JP JP56156650A patent/JPS5857702A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5857702A (ja) | 1983-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2825206B2 (ja) | 金属酸化物電極 | |
West et al. | Equivalent Circuit Modeling of the Ag| As0. 24 S 0.36 Ag0. 40| Ag System Prepared by Photodissolution of Ag | |
JPH01109250A (ja) | ガスセンサ | |
US3923626A (en) | Miniature probe containing multifunctional electrochemical sensing electrodes | |
JPS639721B2 (sv) | ||
US3022667A (en) | Adsorption electric hygrometer | |
Fabry et al. | Ion exchange between two solid-oxide electrolytes | |
US4807187A (en) | Method and device of memory using liquid crystal | |
Bergveld et al. | From conventional membrane electrodes to ion-sensitive field-effect transistors | |
JP2926912B2 (ja) | 酸素センサ | |
JPS5888645A (ja) | ガス中の酸素含量測定センサ | |
Bonne et al. | The polarization impedance of the C| PbCl2 and Pt| PbCl2 interfaces | |
JPS62138747A (ja) | 固体電池に感知相を設けるための方法および固体電池ならびにこの感知相の再生法 | |
JPH0720080A (ja) | 湿度センサ | |
JPS63193053A (ja) | 高温用pH測定装置 | |
Matsui | The complex impedance of superionic conductor cell | |
JPH06148115A (ja) | ガスセンサー | |
JPS61162743A (ja) | 酸素ガス検出装置 | |
JPH03246460A (ja) | 電気化学検出器 | |
JPH02269948A (ja) | 燃焼制御用センサ | |
JPH0532696B2 (sv) | ||
Kumar et al. | Space charge limited currents in pure and iodinated cellulose acetate films | |
Riess | Potential measurements using mixed ionic electronic conductors as probes | |
JP2669527B2 (ja) | 電気化学式センサ | |
JPH01216250A (ja) | 電気化学式センサ |