JPS6396160U - - Google Patents

Info

Publication number
JPS6396160U
JPS6396160U JP19068286U JP19068286U JPS6396160U JP S6396160 U JPS6396160 U JP S6396160U JP 19068286 U JP19068286 U JP 19068286U JP 19068286 U JP19068286 U JP 19068286U JP S6396160 U JPS6396160 U JP S6396160U
Authority
JP
Japan
Prior art keywords
clean room
area
equipment
wafers
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19068286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19068286U priority Critical patent/JPS6396160U/ja
Publication of JPS6396160U publication Critical patent/JPS6396160U/ja
Pending legal-status Critical Current

Links

JP19068286U 1986-12-12 1986-12-12 Pending JPS6396160U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19068286U JPS6396160U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19068286U JPS6396160U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Publications (1)

Publication Number Publication Date
JPS6396160U true JPS6396160U (enrdf_load_stackoverflow) 1988-06-21

Family

ID=31144132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19068286U Pending JPS6396160U (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPS6396160U (enrdf_load_stackoverflow)

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