JPS6395372A - 回転ムラ測定器 - Google Patents

回転ムラ測定器

Info

Publication number
JPS6395372A
JPS6395372A JP24044486A JP24044486A JPS6395372A JP S6395372 A JPS6395372 A JP S6395372A JP 24044486 A JP24044486 A JP 24044486A JP 24044486 A JP24044486 A JP 24044486A JP S6395372 A JPS6395372 A JP S6395372A
Authority
JP
Japan
Prior art keywords
frequency
doppler
signal
amplifier
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24044486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0455270B2 (enrdf_load_stackoverflow
Inventor
Hideo Tashiro
秀夫 田代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP24044486A priority Critical patent/JPS6395372A/ja
Publication of JPS6395372A publication Critical patent/JPS6395372A/ja
Publication of JPH0455270B2 publication Critical patent/JPH0455270B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)
JP24044486A 1986-10-09 1986-10-09 回転ムラ測定器 Granted JPS6395372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24044486A JPS6395372A (ja) 1986-10-09 1986-10-09 回転ムラ測定器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24044486A JPS6395372A (ja) 1986-10-09 1986-10-09 回転ムラ測定器

Publications (2)

Publication Number Publication Date
JPS6395372A true JPS6395372A (ja) 1988-04-26
JPH0455270B2 JPH0455270B2 (enrdf_load_stackoverflow) 1992-09-02

Family

ID=17059584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24044486A Granted JPS6395372A (ja) 1986-10-09 1986-10-09 回転ムラ測定器

Country Status (1)

Country Link
JP (1) JPS6395372A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02179766A (ja) * 1988-12-29 1990-07-12 Ricoh Co Ltd 画像形成装置における位相制御回路
WO2015198470A1 (ja) * 2014-06-27 2015-12-30 パイオニア株式会社 測定装置及び測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02179766A (ja) * 1988-12-29 1990-07-12 Ricoh Co Ltd 画像形成装置における位相制御回路
WO2015198470A1 (ja) * 2014-06-27 2015-12-30 パイオニア株式会社 測定装置及び測定方法

Also Published As

Publication number Publication date
JPH0455270B2 (enrdf_load_stackoverflow) 1992-09-02

Similar Documents

Publication Publication Date Title
US5726756A (en) Exposure apparatus with thickness and defect detection
US4139304A (en) Methods and apparatus for measuring variations in distance to a surface
JPS6135495B2 (enrdf_load_stackoverflow)
CN1320812A (zh) 相位差测量装置及应用该装置的外差干涉测量系统
JPS6395372A (ja) 回転ムラ測定器
WO1989009380A1 (en) Optical measuring apparatus and method
US6628402B1 (en) Phase interference detecting method and system in interferometer, and light detector therefor
JPS6395371A (ja) 回転ムラ測定器
JPH08292264A (ja) レーザドップラー速度測定装置及びこれを用いたカラー画像形成装置
JPH063128A (ja) 光学式表面形状測定装置
JP3410822B2 (ja) レーザドプラ方式振動計
JPS6396584A (ja) 回転ムラ測定器
JPS6395373A (ja) 回転ムラ測定器
JPS62190467A (ja) 速度ムラ測定器
JPS62217177A (ja) 回転ムラ測定器
JPH0955051A (ja) 磁気ヘッドの浮上特性計測方法およびその装置
US7064841B2 (en) Method and arrangement for topographically characterizing a surface of a hard disk with distortion due to disk modes removed
EP0105163A1 (en) Electro-optical velocity measuring system
JPH0363030B2 (enrdf_load_stackoverflow)
JPS5942819B2 (ja) 干渉計の可視度測定装置
JP3038232B2 (ja) 光学式ディスクの欠陥長計測方法及びその装置
JPH0363032B2 (enrdf_load_stackoverflow)
JP3282370B2 (ja) 速度計、速度検出方法及び変位情報検出装置
JPH06301939A (ja) ヘッドスライダ浮上変動量測定装置
JPH0536727B2 (enrdf_load_stackoverflow)