JPS6395303A - 半導体ウェーハの位置合わせ検査装置 - Google Patents

半導体ウェーハの位置合わせ検査装置

Info

Publication number
JPS6395303A
JPS6395303A JP61240501A JP24050186A JPS6395303A JP S6395303 A JPS6395303 A JP S6395303A JP 61240501 A JP61240501 A JP 61240501A JP 24050186 A JP24050186 A JP 24050186A JP S6395303 A JPS6395303 A JP S6395303A
Authority
JP
Japan
Prior art keywords
light
mirror
semiconductor wafer
fresnel zone
zone plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61240501A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045923B2 (https=
Inventor
Shigeru Maruyama
繁 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61240501A priority Critical patent/JPS6395303A/ja
Publication of JPS6395303A publication Critical patent/JPS6395303A/ja
Publication of JPH045923B2 publication Critical patent/JPH045923B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61240501A 1986-10-09 1986-10-09 半導体ウェーハの位置合わせ検査装置 Granted JPS6395303A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61240501A JPS6395303A (ja) 1986-10-09 1986-10-09 半導体ウェーハの位置合わせ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61240501A JPS6395303A (ja) 1986-10-09 1986-10-09 半導体ウェーハの位置合わせ検査装置

Publications (2)

Publication Number Publication Date
JPS6395303A true JPS6395303A (ja) 1988-04-26
JPH045923B2 JPH045923B2 (https=) 1992-02-04

Family

ID=17060452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61240501A Granted JPS6395303A (ja) 1986-10-09 1986-10-09 半導体ウェーハの位置合わせ検査装置

Country Status (1)

Country Link
JP (1) JPS6395303A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07142383A (ja) * 1993-11-22 1995-06-02 Nec Corp 現像用センサ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07142383A (ja) * 1993-11-22 1995-06-02 Nec Corp 現像用センサ装置

Also Published As

Publication number Publication date
JPH045923B2 (https=) 1992-02-04

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