JPS6394975U - - Google Patents
Info
- Publication number
- JPS6394975U JPS6394975U JP18994286U JP18994286U JPS6394975U JP S6394975 U JPS6394975 U JP S6394975U JP 18994286 U JP18994286 U JP 18994286U JP 18994286 U JP18994286 U JP 18994286U JP S6394975 U JPS6394975 U JP S6394975U
- Authority
- JP
- Japan
- Prior art keywords
- container
- residue
- recovery
- crucible
- recovery device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000002210 silicon-based material Substances 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18994286U JPS6394975U (enExample) | 1986-12-09 | 1986-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18994286U JPS6394975U (enExample) | 1986-12-09 | 1986-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6394975U true JPS6394975U (enExample) | 1988-06-18 |
Family
ID=31142697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18994286U Pending JPS6394975U (enExample) | 1986-12-09 | 1986-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6394975U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008157501A (ja) * | 2006-12-21 | 2008-07-10 | Shinko Electric Co Ltd | 真空溶解装置 |
| JP2011057471A (ja) * | 2009-09-07 | 2011-03-24 | Mitsubishi Materials Techno Corp | 残存シリコン融液の除去方法、単結晶シリコンの製造方法、単結晶シリコンの製造装置及び残存シリコン融液吸引器 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60151295A (ja) * | 1984-01-13 | 1985-08-09 | Toshiba Corp | 化合物半導体単結晶の引上げ方法 |
-
1986
- 1986-12-09 JP JP18994286U patent/JPS6394975U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60151295A (ja) * | 1984-01-13 | 1985-08-09 | Toshiba Corp | 化合物半導体単結晶の引上げ方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008157501A (ja) * | 2006-12-21 | 2008-07-10 | Shinko Electric Co Ltd | 真空溶解装置 |
| JP2011057471A (ja) * | 2009-09-07 | 2011-03-24 | Mitsubishi Materials Techno Corp | 残存シリコン融液の除去方法、単結晶シリコンの製造方法、単結晶シリコンの製造装置及び残存シリコン融液吸引器 |
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