JPS63937B2 - - Google Patents

Info

Publication number
JPS63937B2
JPS63937B2 JP54068426A JP6842679A JPS63937B2 JP S63937 B2 JPS63937 B2 JP S63937B2 JP 54068426 A JP54068426 A JP 54068426A JP 6842679 A JP6842679 A JP 6842679A JP S63937 B2 JPS63937 B2 JP S63937B2
Authority
JP
Japan
Prior art keywords
molecular beam
substrate
thin film
growth method
radiation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54068426A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55160421A (en
Inventor
Tsuneo Tanaka
Seiichi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6842679A priority Critical patent/JPS55160421A/ja
Publication of JPS55160421A publication Critical patent/JPS55160421A/ja
Publication of JPS63937B2 publication Critical patent/JPS63937B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6842679A 1979-05-31 1979-05-31 Method and device for thin film growth Granted JPS55160421A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6842679A JPS55160421A (en) 1979-05-31 1979-05-31 Method and device for thin film growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6842679A JPS55160421A (en) 1979-05-31 1979-05-31 Method and device for thin film growth

Publications (2)

Publication Number Publication Date
JPS55160421A JPS55160421A (en) 1980-12-13
JPS63937B2 true JPS63937B2 (OSRAM) 1988-01-09

Family

ID=13373345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6842679A Granted JPS55160421A (en) 1979-05-31 1979-05-31 Method and device for thin film growth

Country Status (1)

Country Link
JP (1) JPS55160421A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625631A (ja) * 1985-07-02 1987-01-12 Fujitsu Ltd 分子線結晶成長装置及び分子線結晶成長方法
US4770895A (en) * 1985-08-07 1988-09-13 The Commonwealth Of Australia Control of uniformity of growing alloy film
AU592110B2 (en) * 1985-08-07 1990-01-04 Commonwealth Of Australia, The Control of uniformity of growing alloy film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5829635B2 (ja) * 1975-05-14 1983-06-23 松下電器産業株式会社 セツゴウガタデンカイコウカトランジスタノ セイゾウホウホウ

Also Published As

Publication number Publication date
JPS55160421A (en) 1980-12-13

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