JPS6393563A - Device for charging and discharging wet base carrier unit work - Google Patents

Abstract

PURPOSE:To obtain a cycle time to spare and to make a cost reduction, by simultaneously feeding works to carriers on the base of a carrier unit, tentatively accommodating carriers on a shelf to be continuously charged to a lapping machine by a robot and to be sequentially and continuously discharged therefrom and accommodating works at a time zone when lapping operation is not effected. CONSTITUTION:A robot R for charging and discharging for a carrier unit is simultaneously supplied with works for the carrier unit by a cartridge system unmachined works feed table S and charge them to a lapping machine in association with it. When a lapping time has elapsed, works are adsorbed to carriers K integrally and all the carriers are discharged sequentially and continuously to be tentatively accommodated on a shelf and they are taken out again in a time zone when lapping operation is not effected. The works are accommodated through a work accommodation robot H in association with a rack pitch of a two-stage conveyer CV and empty carriers wait on the shelf for a next cycle to come again. Therefore, a cartridge system carrier unit simultaneous insertion prevents an excessive cycle time, whereby cost can be reduced.

Description

[Detailed description of the invention] 1) Field of industrial application ■ Wrapping robot for bulk loading of carrier units ■ Separation and conveyance of wet wafers and other thin and fragile laminated and close-contact workpieces 2) Conventional technology Wrapping machine operation is all manual and unmanned operation Recognition example F! ,there is no.

8) Problems to be solved by the invention■ The workpiece diameter, cartridge inner diameter, and carrier diameter are each 0.
．． Low-cost development of centering structure for instantaneous mating and insertion of 5 to 10 pieces at the same time with a mating difference of 1 to 0.2χ.■ To prevent operational accidents, it is possible to securely insert thin workpieces (Ueno) that are easily broken during close lamination. Discovery of a structure that guarantees 100% instantaneous separation and levitation 4) Measures to solve the problem ■ Concentricity of the work supply table, carrier, carrier storage tray, etc. by fitting the tapered pin of the compatible carrier.
Due to the structure that allows instantaneous phase matching.

■ Closely laminated unprocessed workpieces are stored in a water retention car) The overlap of the top loaded into the IJ jig is not affected by the stacking error of the workpieces, and the high-pressure fluid injection nozzle line, which is the decisive factor in separation performance, is always automatically and accurately corrected. Discovery of a principle structure that reliably separates and levitates the top piece.

5) Effect ■ The cartridge type supply table (8) has the same number of carrier work holes as the cartridge case (Figs. 8 to 9) α → diameter D1 is compatible with the carrier hole D2 and is concentric (D2>Di).
The information detected by the sensor on the height of the top work is input to the piston lifting servo motor α, which pushes up one pitch by the thickness of the work, and always sends the overlapping part of the top work W, which is closely stacked, to the separation fluid injection nozzle line. match, pressurize fluid from nozzle αη, and top workpiece WI
I''t, it is separated and floated, and the moment when the carrier hole is fitted, it is adsorbed to the bat waiting on the upper surface of the carrier.In operation, all the workpieces are simultaneously inserted into the carrier by the pistons of all the cartridges that are compatible and concentric with the carrier.

■ To load the carrier unit, in order to quickly and continuously collect the workpieces at the wet edge, the robot rotates to continuously transfer the carriers (A) containing the workpieces via the water retention tray (1) waiting on the lift revolving table (6). The tray (1) is temporarily stored on a shelf linked to the rotating table (6), and during the wrapping period, the tray (1) is pulled out again to the rotating table (6), and the tray-loaded carrier housing work is transferred to another robot α. Intermittent rotation of table (6) and two-stage conveyor (
]V) Stored in conjunction with the work rack above.

6) Example: In lapping operations for workpieces such as wafers, where a dry environment causes deterioration in quality, it is necessary to shorten the cycle time by performing the entire workpiece loading and unloading process in a wet environment in order to maintain and improve the investment effect. , Achieve simultaneous instantaneous insertion of unprocessed workpieces one by one into all workpiece holes of all carriers, which are easily broken due to close contact with each other in wet conditions, and continuously load and transfer the carriers onto the water retention tray. The robot repeats the rapid continuous transfer of money between the lift revolving table and the shelf, returns the empty carrier to the work supply cartridge in a short cycle with the swing of the robot's arm, and then repeats the above-mentioned operation to receive the unprocessed work again.

During the wrapping time, the storage shelf, lift revolving table, and another robot that stores the work in racks work together to store the work in racks.

The carrier unit loading and unloading robot @ shown in the overall plan view of Fig. 1 is a cartridge type unprocessed workpiece supply table (S) that simultaneously supplies workpieces W to the carrier unit and loads them in conjunction with the lapping machine, and the lapping timeout Post work W
and carriers (A) are sucked all at once, and the carriers (A) are lowered by engaging with the positioning taper pin (2) of the water retention tray (1) on the lift revolving table (6), and all the carriers are sequentially loaded in a continuous manner. The workpieces are temporarily stored on a shelf linked to the rotating table (6), and then pulled out to the table (6) again during the wrapping time. The workpieces are stored in conjunction with the rack pitch of the two-stage conveyor (CV) via the robot αυ, and the empty carriers are returned to the table (6). Waits on the shelf until the next cycle.

7) Effects of the invention■ The back-time process with many workpiece holes in the carrier used to cause cycle time overruns, but by adopting a cartridge system, simultaneous insertion of each carrier was achieved, and the cycle time margin for related equipment reduced costs. This was a contributing factor.

■ With the discovery of a simple structure, we can handle wet workpieces (wafers), completely eliminating concerns about quality deterioration due to drying, and
The cost of cartridge supply could actually be reduced.

■ Cycle time for loading carrier units has been shortened.

■ 25% of equipment occupancy was saved.

[Brief explanation of the drawing]

Figure 1...Overall plan view Figure 2...Cross-sectional view of storage shelves and lift turning table No. 8
Figure... Lift rotating table plan view Figure 4... Car)
IJ-type supply table plan view Figure 5... Supply table sectional view Figure 6... Carrier and workpiece plan view Figure 7... Carrier and workpiece cross-sectional view Figure 8... Car) Plan view Fig. 9 Plan view of water storage tray Fig. 10 Cross-sectional view of carrier loading tray (1)...
Water retention tray (2)... Taper bin for positioning on the tray (3)...
Mo...Evening (4)...Cylinder (5)...
・Bottle fitting lift motor (6)...Lift rotation table (7)...Screw (8)...Frame (
9)...Work pushing up piston OQ...Piston fixing base α...Motor @...Screw (to)...
Piston α→ Cartridge case 00・
...Work rack aQ...Eccentric suction butt (1
7)...Nozzle C...Tray transfer bullbra■...Work storage robot K...Carrier General...Robot S...Work supply table C■...Two-stage conveyor T8... Carrier relay storage shelf and lift turning table W... Work d... Work diameter D1 ・
...Cartridge inner diameter D2...Carrier workpiece inner diameter

Claims (1)

[Claims] In order to consistently maintain the quality of the work in a wet environment during the loading and unloading process of the work on the lapping machine and to shorten the cycle time, a compatible carrier is set up, and a wet cartridge system with the same number of work holes is installed in the carrier on the underside of the robot in units of carriers. The robot continuously loads the work into the lapping machine, and the continuous loading carrier transfers it to the holding tray on the lift revolving table that is linked to the relay shelf and stores it temporarily, and then stores the work during the wrapping time. A wet base carrier unit workpiece loading and unloading device featuring the following features: