JPS6393563A - Device for charging and discharging wet base carrier unit work - Google Patents

Device for charging and discharging wet base carrier unit work

Info

Publication number
JPS6393563A
JPS6393563A JP61134297A JP13429786A JPS6393563A JP S6393563 A JPS6393563 A JP S6393563A JP 61134297 A JP61134297 A JP 61134297A JP 13429786 A JP13429786 A JP 13429786A JP S6393563 A JPS6393563 A JP S6393563A
Authority
JP
Japan
Prior art keywords
works
carrier unit
carriers
lapping
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61134297A
Other languages
Japanese (ja)
Inventor
Toshio Konishi
Original Assignee
Otani Reiji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otani Reiji filed Critical Otani Reiji
Priority to JP61134297A priority Critical patent/JPS6393563A/en
Publication of JPS6393563A publication Critical patent/JPS6393563A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a cycle time to spare and to make a cost reduction, by simultaneously feeding works to carriers on the base of a carrier unit, tentatively accommodating carriers on a shelf to be continuously charged to a lapping machine by a robot and to be sequentially and continuously discharged therefrom and accommodating works at a time zone when lapping operation is not effected. CONSTITUTION:A robot R for charging and discharging for a carrier unit is simultaneously supplied with works for the carrier unit by a cartridge system unmachined works feed table S and charge them to a lapping machine in association with it. When a lapping time has elapsed, works are adsorbed to carriers K integrally and all the carriers are discharged sequentially and continuously to be tentatively accommodated on a shelf and they are taken out again in a time zone when lapping operation is not effected. The works are accommodated through a work accommodation robot H in association with a rack pitch of a two-stage conveyer CV and empty carriers wait on the shelf for a next cycle to come again. Therefore, a cartridge system carrier unit simultaneous insertion prevents an excessive cycle time, whereby cost can be reduced.
JP61134297A 1986-06-10 1986-06-10 Device for charging and discharging wet base carrier unit work Pending JPS6393563A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61134297A JPS6393563A (en) 1986-06-10 1986-06-10 Device for charging and discharging wet base carrier unit work

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61134297A JPS6393563A (en) 1986-06-10 1986-06-10 Device for charging and discharging wet base carrier unit work

Publications (1)

Publication Number Publication Date
JPS6393563A true JPS6393563A (en) 1988-04-23

Family

ID=15124988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61134297A Pending JPS6393563A (en) 1986-06-10 1986-06-10 Device for charging and discharging wet base carrier unit work

Country Status (1)

Country Link
JP (1) JPS6393563A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008137153A (en) * 2008-01-28 2008-06-19 Sumco Corp Double-side grinding device, and brush and dresser used therefore
US8002610B2 (en) 1999-05-17 2011-08-23 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8002610B2 (en) 1999-05-17 2011-08-23 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus
JP2008137153A (en) * 2008-01-28 2008-06-19 Sumco Corp Double-side grinding device, and brush and dresser used therefore

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