JPS6393492A - レ−ザ加工用集光レンズ制御装置 - Google Patents

レ−ザ加工用集光レンズ制御装置

Info

Publication number
JPS6393492A
JPS6393492A JP61237391A JP23739186A JPS6393492A JP S6393492 A JPS6393492 A JP S6393492A JP 61237391 A JP61237391 A JP 61237391A JP 23739186 A JP23739186 A JP 23739186A JP S6393492 A JPS6393492 A JP S6393492A
Authority
JP
Japan
Prior art keywords
laser beam
processing
lens
workpiece
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61237391A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0585276B2 (enrdf_load_stackoverflow
Inventor
Takeshi Kitsukawa
橘川　彪
Yoshihide Kanehara
好秀 金原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61237391A priority Critical patent/JPS6393492A/ja
Publication of JPS6393492A publication Critical patent/JPS6393492A/ja
Publication of JPH0585276B2 publication Critical patent/JPH0585276B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP61237391A 1986-10-06 1986-10-06 レ−ザ加工用集光レンズ制御装置 Granted JPS6393492A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61237391A JPS6393492A (ja) 1986-10-06 1986-10-06 レ−ザ加工用集光レンズ制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61237391A JPS6393492A (ja) 1986-10-06 1986-10-06 レ−ザ加工用集光レンズ制御装置

Publications (2)

Publication Number Publication Date
JPS6393492A true JPS6393492A (ja) 1988-04-23
JPH0585276B2 JPH0585276B2 (enrdf_load_stackoverflow) 1993-12-06

Family

ID=17014694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61237391A Granted JPS6393492A (ja) 1986-10-06 1986-10-06 レ−ザ加工用集光レンズ制御装置

Country Status (1)

Country Link
JP (1) JPS6393492A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142688A (ja) * 1988-11-21 1990-05-31 Mitsubishi Heavy Ind Ltd レーザー装置の光学部品熱レンズ監視方法
JPH03285784A (ja) * 1990-03-31 1991-12-16 Okuma Mach Works Ltd 焦点距離自動補正装置付レーザ加工機
JPH0751870A (ja) * 1993-08-18 1995-02-28 Mitsubishi Electric Corp レーザ加工装置
US8648279B2 (en) 2008-04-04 2014-02-11 Mitsubishi Electric Corporation Process control apparatus and laser processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61186186A (ja) * 1985-02-13 1986-08-19 Mitsubishi Electric Corp レ−ザ光集光装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61186186A (ja) * 1985-02-13 1986-08-19 Mitsubishi Electric Corp レ−ザ光集光装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142688A (ja) * 1988-11-21 1990-05-31 Mitsubishi Heavy Ind Ltd レーザー装置の光学部品熱レンズ監視方法
JPH03285784A (ja) * 1990-03-31 1991-12-16 Okuma Mach Works Ltd 焦点距離自動補正装置付レーザ加工機
JPH0751870A (ja) * 1993-08-18 1995-02-28 Mitsubishi Electric Corp レーザ加工装置
US8648279B2 (en) 2008-04-04 2014-02-11 Mitsubishi Electric Corporation Process control apparatus and laser processing apparatus
DE112009000774B4 (de) 2008-04-04 2018-02-15 Mitsubishi Electric Corporation Laserprozessierungsvorrichtung beinhaltend eine Prozesssteuervorrichtung

Also Published As

Publication number Publication date
JPH0585276B2 (enrdf_load_stackoverflow) 1993-12-06

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