JPS639177B2 - - Google Patents
Info
- Publication number
- JPS639177B2 JPS639177B2 JP55017777A JP1777780A JPS639177B2 JP S639177 B2 JPS639177 B2 JP S639177B2 JP 55017777 A JP55017777 A JP 55017777A JP 1777780 A JP1777780 A JP 1777780A JP S639177 B2 JPS639177 B2 JP S639177B2
- Authority
- JP
- Japan
- Prior art keywords
- waveform
- light
- face plate
- defect
- spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1777780A JPS56115944A (en) | 1980-02-18 | 1980-02-18 | Detection device of panel plate defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1777780A JPS56115944A (en) | 1980-02-18 | 1980-02-18 | Detection device of panel plate defect |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56115944A JPS56115944A (en) | 1981-09-11 |
| JPS639177B2 true JPS639177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-02-26 |
Family
ID=11953140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1777780A Granted JPS56115944A (en) | 1980-02-18 | 1980-02-18 | Detection device of panel plate defect |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56115944A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58162038A (ja) * | 1982-03-23 | 1983-09-26 | Canon Inc | 面状態検査装置 |
| DE3800053A1 (de) * | 1988-01-04 | 1989-07-13 | Sick Optik Elektronik Erwin | Optische fehlerinspektionsvorrichtung |
| JPS63241343A (ja) * | 1988-02-24 | 1988-10-06 | Nikon Corp | 欠陥検査装置 |
| KR101103347B1 (ko) * | 2009-08-24 | 2012-01-05 | 삼성코닝정밀소재 주식회사 | 평판 유리 표면 이물질 검사 장치 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ZA754657B (en) * | 1974-07-27 | 1976-07-28 | Beecham Group Ltd | Adhesive composition |
-
1980
- 1980-02-18 JP JP1777780A patent/JPS56115944A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56115944A (en) | 1981-09-11 |