JPS639049A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPS639049A
JPS639049A JP15172986A JP15172986A JPS639049A JP S639049 A JPS639049 A JP S639049A JP 15172986 A JP15172986 A JP 15172986A JP 15172986 A JP15172986 A JP 15172986A JP S639049 A JPS639049 A JP S639049A
Authority
JP
Japan
Prior art keywords
layer
magneto
optical recording
substrate
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15172986A
Other languages
Japanese (ja)
Other versions
JPH0777045B2 (en
Inventor
Kazuoki Motomiya
一興 本宮
Mitsuharu Sawamura
光治 沢村
Tsutomu Shiratori
力 白鳥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61151729A priority Critical patent/JPH0777045B2/en
Publication of JPS639049A publication Critical patent/JPS639049A/en
Publication of JPH0777045B2 publication Critical patent/JPH0777045B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To obviate the generation of cracks in a recording layer and the generation of exfoliation between respective layers by using specific silicon oxide to form an under coat layer in contact with a substrate. CONSTITUTION:The under coat layer 2c consisting of SiO1+x (where 0<x<1) is formed on the substrate 1a consisting of plastic (e.g.; polycarbonate). The under coat layer 2b consisting of a ZnS film, etc., the recording layer 3 consisting of a GdTbFe film or the like, a spacer layer 4, a reflective layer 5 and a protective layer 6 are successively laminated on the layer 2c. A substrate 1b for protection is stuck by an adhesive agent 7 on the surface of the layer 6. The recording medium with which cracks and exfoliation are hardly generated is thereby obtd. and the environmental resistance of the recording medium for which the plastic substrate in particular is used is improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光ビームにより記録、再生を行なうことが可
能な光学的記録媒体に関し、中でも光磁気記録層を有す
る光磁気記録媒体に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an optical recording medium capable of recording and reproducing information using a light beam, and particularly relates to a magneto-optical recording medium having a magneto-optical recording layer. be.

(従来の技術) 従来より、光ディスクに用いられる光学的記録媒体とし
ては、希土類−遷移金属の合金薄膜、非晶質から結晶へ
の相転移を利用したカルコゲン化合物等の連光性酸化物
薄膜、ヒートモード記録媒体、サーモプラスチック記録
媒体等が知られている。例えば希土類−aB金金属合金
薄膜で形成される光磁気記録媒体としては、MnB1.
 MnCuB1などの多結晶薄膜、GdCo、GdFe
、 TbFe、 DyFe、GdTbFe、 TbDy
Fe、 GdFeCo、TbFeCo、GdTbCoな
どの非晶質薄膜、Gd1Gなどの単結晶薄膜などが知ら
れている。
(Prior Art) Conventionally, optical recording media used in optical discs include thin films of rare earth-transition metal alloys, thin films of continuous oxides such as chalcogen compounds that utilize phase transition from amorphous to crystalline, Heat mode recording media, thermoplastic recording media, etc. are known. For example, as a magneto-optical recording medium formed of a rare earth-aB gold metal alloy thin film, MnB1.
Polycrystalline thin films such as MnCuB1, GdCo, GdFe
, TbFe, DyFe, GdTbFe, TbDy
Amorphous thin films such as Fe, GdFeCo, TbFeCo, and GdTbCo, and single crystal thin films such as Gd1G are known.

これら薄膜のうち、大面積の薄膜を室温近傍の温度で製
作する際の成膜性、信号を小さな光熱エネルギーで書き
込むための書き込み効率、および書き込まれた信号をS
/N比よく読み出すための読み出し効率等を勘案して、
最近では、面記非晶質薄膜が光磁気記録媒体用として優
れていると考えられている。特に、150〜200℃程
度のキューリ一温度を持つ(+dTbFeやカー回転角
が大きく再生性能に優れたGdTbFe(:o (特開
昭58−196639号公@)等が光磁気記録媒体用と
して@通である。
Among these thin films, the film forming performance when producing a large-area thin film at a temperature near room temperature, the writing efficiency for writing signals with small photothermal energy, and the S
Considering readout efficiency etc. to read out with good /N ratio,
Recently, planar amorphous thin films are considered to be excellent for use in magneto-optical recording media. In particular, (+dTbFe), which has a Curie temperature of about 150 to 200°C, and GdTbFe, which has a large Kerr rotation angle and excellent reproduction performance (:o (Japanese Unexamined Patent Publication No. 1986-196639)), are used for magneto-optical recording media. I am a connoisseur.

しかしなから、一般に前記GdTbFe等をはじめとし
て、光磁気記録媒体に用いられる非晶質磁性体は、耐蝕
性が悪いという欠点を存している。すなわち、大気や水
蒸気に触わると磁気特性が劣化し、最終的には完全に酸
化されて透明化し、磁気特性を失ってしまうのである。
However, in general, amorphous magnetic materials used in magneto-optical recording media, such as the above-mentioned GdTbFe, have a drawback of poor corrosion resistance. In other words, when it comes into contact with air or water vapor, its magnetic properties deteriorate, and eventually it becomes completely oxidized, becomes transparent, and loses its magnetic properties.

このような欠点を除去するため、従来から光磁気記録層
の上または下に、例えばSiO□、5iO1A1203
 、 Si3N4 、2nSなどの透明物質等からなる
下引き層や保護層などの各種の機能層を設けた光磁気記
録媒体が提案されている。これら物質の中でも、ZnS
は耐蝕性に優れることから上記光磁気記録媒体の下引き
層や保護層として広く用いられている。しかしながら、
ZnSはプラスチック等の吸湿性のある基板に対しては
密着性に欠けるため、このような基板を用いた光磁気記
録媒体では光磁気記録層にクラックを生じたり、各層間
にハガレを生じることがあった。特に、このような光磁
気記録媒体の耐久性の評価方法として採用されている環
境条件、例えば温度45℃、相対湿度95%といったよ
うな高温、高湿下では、前記のようなりラックやハガレ
の問題は避けられなかった。
In order to eliminate such defects, for example, SiO
Magneto-optical recording media have been proposed that are provided with various functional layers such as undercoat layers and protective layers made of transparent materials such as , Si3N4, and 2nS. Among these substances, ZnS
Because of its excellent corrosion resistance, it is widely used as an undercoat layer or protective layer of the above-mentioned magneto-optical recording media. however,
Since ZnS lacks adhesion to hygroscopic substrates such as plastic, magneto-optical recording media using such substrates are prone to cracks in the magneto-optical recording layer and peeling between layers. there were. In particular, under the environmental conditions adopted as a durability evaluation method for such magneto-optical recording media, for example, under high temperature and high humidity conditions such as a temperature of 45°C and a relative humidity of 95%, racks and peeling may occur as described above. Problems were inevitable.

このような問題を解消するため、基板との密着性に勝る
SiOよりなる下引き層を基板上に設けた後、更にその
上にZnSよりなる下引き層を設けるといったように下
引き層を複層構成として耐久性の向上をはかる試みもな
されている。
In order to solve this problem, multiple undercoat layers are used, such as providing an undercoat layer made of SiO, which has excellent adhesion to the substrate, on the substrate, and then providing an undercoat layer made of ZnS on top of it. Attempts have also been made to improve durability by changing the layer structure.

第2図に、このような従来の光磁気記録媒体の一例を示
す。
FIG. 2 shows an example of such a conventional magneto-optical recording medium.

この光磁気記録媒体は、書き込み側基板la上に、Si
Oよりなる下引き層2aを設け、その上に更にZnSよ
りなる下引き層2bを設けた複層構成の下引き層を育し
、この上に光磁気記録層3、スペーサ層4、反射層5、
保護層6、接着層7を順次積層した後、保護用基板1b
を接着形成したものである。
This magneto-optical recording medium has Si on the writing side substrate la.
An undercoat layer 2a made of O is provided, and an undercoat layer 2b made of ZnS is further provided thereon to form a multilayer undercoat layer. On top of this, a magneto-optical recording layer 3, a spacer layer 4, and a reflective layer are formed. 5,
After sequentially laminating the protective layer 6 and the adhesive layer 7, the protective substrate 1b
It is formed by adhesion.

しかしながら、これにしてもより厳しい環境条件下、例
えば温度60℃、相対湿度90%といったような条件下
では、前記のようなりラックやハガレの問題を生じ、耐
環境性のより向上した光磁気記録媒体が所望されている
However, even with this, under more severe environmental conditions, such as a temperature of 60°C and a relative humidity of 90%, problems with racking and peeling as described above occur, and magneto-optical recording with improved environmental resistance Media is desired.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明は上記の諸点に鑑み成されたものであって、本発
明の目的とするところは、従来の光磁気記録媒体に比し
て耐環境性により優れた光磁気記録媒体を提供すること
にある。
The present invention has been made in view of the above points, and an object of the present invention is to provide a magneto-optical recording medium that has better environmental resistance than conventional magneto-optical recording media. be.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の上記目的は、以下の本発明によって達成される
The above objects of the present invention are achieved by the present invention as follows.

基板および該基板に相接する下引き層を備え、該下引き
層上に少なくとも光磁気記録層と保護層とを有する光磁
気記録媒体において、前記基板に相接する下引き層がS
in、やw(但し、O<x<1)より成ることを特徴と
する光磁気記録媒体。
In a magneto-optical recording medium comprising a substrate and an undercoat layer in contact with the substrate, and having at least a magneto-optical recording layer and a protective layer on the underlayer, the undercoat layer in contact with the substrate is S.
A magneto-optical recording medium characterized by comprising in, or w (where O<x<1).

〔作用) 本発明の光磁記録媒体は、5I014X (但し、0<
x<1、好ましくは0.4 < x < 0.9 )な
る下引き層を有し、前述したような環境条件下、例えば
温度45℃、相対湿度95%といった条件下はもとより
、これよりも更に厳しい温度60℃、相対湿度90%と
いった条件下においても、前述したクラックやハガレ等
の問題を生じることがなく、極めて優れた耐環境性を有
するものである。
[Function] The magneto-optical recording medium of the present invention has 5I014X (where 0<
x < 1, preferably 0.4 < Furthermore, even under severe conditions such as a temperature of 60° C. and a relative humidity of 90%, the above-mentioned problems such as cracking and peeling do not occur, and it has extremely excellent environmental resistance.

このような作用を臭し得る理由は必ずしも定かではない
が、以下のような理由によるものと推察される。5i(
lおよび5i02は下引き層や保護層として従来用いら
れているものであるが、SiOには基板との密着性には
優れるものの緻密性には欠け、酸化防止機能に劣る欠点
がある。一方、5i02はSiOよりも緻密であり優れ
た酸化防止機能を有するものの、基板との密着性には劣
る欠点がある。
Although it is not necessarily clear why such an effect can be noticed, it is presumed to be due to the following reasons. 5i(
1 and 5i02 are conventionally used as an undercoat layer or a protective layer, but SiO has the disadvantage that although it has excellent adhesion to the substrate, it lacks denseness and is inferior in antioxidation function. On the other hand, although 5i02 is denser than SiO and has an excellent anti-oxidation function, it has the disadvantage of poor adhesion to the substrate.

これは、薄溝において基板との密着性を良好にしている
と考えられるSiの未結合手が、後者では飽和されてい
るためと考えられる。しかしながらこのような未結合手
の存在は、緻密性においてはマイナス要因として作用し
、SiOの透湿防止機能を低下させているものと思われ
る。ところが、本発明ではSiOと5i02の間の組成
比で下引き層を構成しているため、両者の優れた特性が
ともに十分に発揮され、光磁気記録媒体の耐環境性が向
上したものと思われる。
This is thought to be because the dangling bonds of Si, which are thought to improve the adhesion with the substrate in the thin groove, are saturated in the latter. However, the presence of such dangling bonds acts as a negative factor in terms of compactness, and is thought to reduce the moisture permeation prevention function of SiO. However, in the present invention, since the undercoat layer is composed of a composition ratio between SiO and 5i02, the excellent properties of both are fully exhibited, and it is thought that the environmental resistance of the magneto-optical recording medium is improved. It will be done.

上記Sin、。X(但し、0<x<1)め組成よりなる
下引き層の形成は、例えばSiOを出発原料として、0
2雰囲気中で真空蒸着する、あるいはSiOと5i02
とを出発原料として、これらを同時に蒸着もしくはスパ
ッタリングする等によるとよい。
The above Sin. Formation of an undercoat layer having a composition of
2 vacuum evaporation in an atmosphere, or SiO and 5i02
It is preferable to simultaneously evaporate or sputter them using these as starting materials.

このような下引き層を有する本発明の光磁気記録媒体の
一例を第1図に示す。
An example of the magneto-optical recording medium of the present invention having such an undercoat layer is shown in FIG.

第1図において、図中に符合20で示すものが、基板1
aに相接して設けた5iO1*x (但し、0<x<1
)よりなる下引き層である。本例の光磁気記録媒体は、
このような下引き層2Cを設ける以外は第2図に例示の
従来例の光磁気記録媒体と同様の構成とされており、図
中に符合2bで示すものは前述したZnS等よりなる下
引き層であり、3は光磁気記録層、4はスペーサ層、5
は反射層、6は保護層、7は接着層、lbは保護用基板
である。
In FIG. 1, what is indicated by the reference numeral 20 is a substrate 1.
5iO1*x provided adjacent to a (however, 0<x<1
) is the undercoat layer. The magneto-optical recording medium of this example is
Except for providing such an undercoat layer 2C, the structure is the same as that of the conventional magneto-optical recording medium illustrated in FIG. 3 is a magneto-optical recording layer, 4 is a spacer layer, and 5 is a layer.
6 is a reflective layer, 6 is a protective layer, 7 is an adhesive layer, and lb is a protective substrate.

〔実施例〕〔Example〕

本発明を更に具体的に説明するため、以下に本発明の実
施例を示す。
In order to explain the present invention more specifically, Examples of the present invention are shown below.

実施例1 第1図に例示の光磁気記録媒体を以下のようにして作成
した。
Example 1 The magneto-optical recording medium illustrated in FIG. 1 was produced as follows.

厚さ1.2 mmのポリカーボネイトよりなるプラスチ
ック板を基板1aとし、該基板Ia上に厚さ約1300
人のSin、や、I(但し、O<x<1)よりなる下引
き層2cを真空蒸着により形成した。
A plastic plate made of polycarbonate with a thickness of 1.2 mm is used as the substrate 1a, and a plate with a thickness of about 1300 mm is placed on the substrate Ia.
An undercoat layer 2c made of human Sin or I (O<x<1) was formed by vacuum evaporation.

下引き層2cの形成は、蒸着とスパッタリングをともに
行なうことが可能な周知の成膜装置の真空槽内に基板1
aを挿入した後、該真空槽内を5×10’ Torr以
下まで排気し、その後Ozガスを導入して、I X I
Q′4Torrの圧力で出発原料としてのSiOを蒸発
させることによって行なった。この際、下引き層2cの
屈折率が1.55±0.022となるように蒸着速度を
制御して膜形成を行なったところ、基板la上に5lO
I*x (但し、x=0.8)の組成の下引き層2cが
得られた。
The undercoat layer 2c is formed by placing the substrate 1 in a vacuum chamber of a well-known film forming apparatus capable of performing both vapor deposition and sputtering.
After inserting the IXI
This was done by evaporating SiO as a starting material at a pressure of Q'4 Torr. At this time, when the film was formed by controlling the deposition rate so that the refractive index of the undercoat layer 2c was 1.55±0.022, 5lO
An undercoat layer 2c having a composition of I*x (x=0.8) was obtained.

次に、真空槽の真空を保持したまま上記下引き層2c上
に、厚さ約300人のZnSよりなる下引き層2bをス
パッタリングにより形成した。
Next, while maintaining the vacuum in the vacuum chamber, an undercoat layer 2b made of ZnS having a thickness of approximately 300 was formed by sputtering on the undercoat layer 2c.

次に、上記と同様に真空槽の真空を破ることなく、高周
波スパッタリングによってGdTbFeよりなる膜厚約
150人の光磁気記録層3を上記下引き層2b上に形成
した。
Next, in the same manner as above, without breaking the vacuum in the vacuum chamber, a magneto-optical recording layer 3 made of GdTbFe with a thickness of approximately 150 mm was formed on the undercoat layer 2b by high frequency sputtering.

以下、真空を破ることなく上記と同様のスパッタリング
により、膜厚300人のZnSと膜厚約1100人のS
iOよりなるスペーサ層4、膜厚約800人のAtより
なる反射層5および膜厚約2800人のSiOよりなる
保護層6を順次形成した。
Hereinafter, by sputtering similar to the above without breaking the vacuum, ZnS with a thickness of 300 and S with a thickness of approximately 1100 were prepared.
A spacer layer 4 made of iO, a reflective layer 5 made of At about 800 thick, and a protective layer 6 made of SiO about 2800 thick were successively formed.

その後、上記各層を形成した基板1aを真空槽内より取
り出し、接着層7としてホットメルト接着剤を用いて、
保護用プラスチック基板1bと貼り合わせて光磁気記録
媒体を完成した。
After that, the substrate 1a on which each of the above layers was formed was taken out from the vacuum chamber, and a hot melt adhesive was used as the adhesive layer 7.
A magneto-optical recording medium was completed by bonding it to a protective plastic substrate 1b.

こうして得られた光磁気記録媒体を温度60℃、相対湿
度90%の恒温恒湿槽に保持して1000時間の耐環境
試験を実施したところ、この光磁気記録媒体は1000
時間の経過後にも外観上の変化は特に見られず、クラッ
クや膜ハガレも全く発生していす、従来にない優れた耐
環境性を有していることか分った。
The magneto-optical recording medium thus obtained was kept in a constant temperature and humidity chamber at a temperature of 60°C and a relative humidity of 90% and subjected to an environmental resistance test for 1000 hours.
No particular changes in appearance were observed even after the passage of time, and no cracks or peeling of the film occurred, indicating that it has unprecedented environmental resistance.

実施例2 下引き層2c膜形成の02をそれぞれ2 x 10′4
Torrおよび8 x to−STorrとする以外は
実施例1と同様にして、下引き層2cが5101+X 
(但し、x = 0.85)およびSin、□(但し、
 x=0.7 )の組成の光磁気記録媒体をそれぞれ得
た。
Example 2 02 for undercoat layer 2c film formation was 2 x 10'4 each.
Torr and 8 x to STorr, but in the same manner as in Example 1, the undercoat layer 2c was 5101+X
(However, x = 0.85) and Sin, □ (However,
Magneto-optical recording media each having a composition of x=0.7) were obtained.

これら光磁気記録媒体について実施例1と同様の耐環境
試験を施したところ、いずれの場合にも実施例1と同様
に1000時間の経過後にもクラックや膜ハガレは見ら
れず、優れた耐環境性を有するものであった。
When these magneto-optical recording media were subjected to the same environmental resistance test as in Example 1, no cracks or peeling of the film were observed in any case even after 1000 hours as in Example 1, indicating that they had excellent environmental resistance. It had a sexual nature.

比較例 出発原料をそれぞれSiOおよび5i02とし、酸素を
導入しない以外は実施例1と同様にして、それぞれSi
Oおよび5i02よりなる下引き層2aを有する第2図
に例示の従来構成の光磁気記録媒体を得た。
Comparative Example The starting materials were SiO and 5i02, respectively, and Si
A magneto-optical recording medium having the conventional structure illustrated in FIG. 2 and having an undercoat layer 2a made of O and 5i02 was obtained.

これら光磁気記録媒体について実施例1と同様の耐環境
試験を行なったところ、SiOよりなる下引き層2aを
有するものでは300時間経過後、SiO□よりなる下
引き層2aを有するものでは400時間経道後に膜ハガ
レおよびクラックが発生した。
When these magneto-optical recording media were subjected to the same environmental resistance test as in Example 1, it was found that the one with the undercoat layer 2a made of SiO was tested after 300 hours, and the one with the undercoat layer 2a made of SiO□ was tested after 400 hours. Membrane peeling and cracking occurred after passage.

〔発明の効果〕〔Effect of the invention〕

以上に説明したように、本発明によれば、従来に比して
耐環境性の著しく向上した光磁気記録媒体を提供するこ
とができる。特に、耐環境性がともすれば低かったプラ
スチック基板を用いた光磁気記録媒体の耐環境性を向上
させることが可能である。
As described above, according to the present invention, it is possible to provide a magneto-optical recording medium with significantly improved environmental resistance compared to the conventional one. In particular, it is possible to improve the environmental resistance of a magneto-optical recording medium using a plastic substrate, which otherwise has low environmental resistance.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の光磁気記録媒体の一例の概略断面図、
第2図は従来の光磁気記録媒体の一例の概略断面図であ
る。 18%lb−・基板 2a、 2b、 2c−下引き層 3・・・光磁気記録層   4・・・スペーサ層5−反
射層      6・−保護層 7・・・接着層
FIG. 1 is a schematic cross-sectional view of an example of the magneto-optical recording medium of the present invention;
FIG. 2 is a schematic cross-sectional view of an example of a conventional magneto-optical recording medium. 18%lb--Substrate 2a, 2b, 2c--Undercoat layer 3--Magneto-optical recording layer 4--Spacer layer 5--Reflection layer 6--Protective layer 7--Adhesive layer

Claims (1)

【特許請求の範囲】[Claims] (1)基板および該基板に相接する下引き層を備え、該
下引き層上に少なくとも光磁気記録層と保護層とを有す
る光磁気記録媒体において、前記基板に相接する下引き
層がSiO_1_+_x(但し、0<x<1)より成る
ことを特徴とする光磁気記録媒体。
(1) A magneto-optical recording medium comprising a substrate and an undercoat layer in contact with the substrate, and having at least a magneto-optical recording layer and a protective layer on the underlayer, wherein the undercoat layer in contact with the substrate A magneto-optical recording medium comprising SiO_1_+_x (0<x<1).
JP61151729A 1986-06-30 1986-06-30 Magneto-optical recording medium Expired - Fee Related JPH0777045B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61151729A JPH0777045B2 (en) 1986-06-30 1986-06-30 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61151729A JPH0777045B2 (en) 1986-06-30 1986-06-30 Magneto-optical recording medium

Publications (2)

Publication Number Publication Date
JPS639049A true JPS639049A (en) 1988-01-14
JPH0777045B2 JPH0777045B2 (en) 1995-08-16

Family

ID=15525013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61151729A Expired - Fee Related JPH0777045B2 (en) 1986-06-30 1986-06-30 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH0777045B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936346A (en) * 1982-08-20 1984-02-28 Matsushita Electric Ind Co Ltd Recording carrier

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936346A (en) * 1982-08-20 1984-02-28 Matsushita Electric Ind Co Ltd Recording carrier

Also Published As

Publication number Publication date
JPH0777045B2 (en) 1995-08-16

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