JPS6389969U - - Google Patents
Info
- Publication number
- JPS6389969U JPS6389969U JP18488786U JP18488786U JPS6389969U JP S6389969 U JPS6389969 U JP S6389969U JP 18488786 U JP18488786 U JP 18488786U JP 18488786 U JP18488786 U JP 18488786U JP S6389969 U JPS6389969 U JP S6389969U
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- electrode
- plasma etching
- sintered body
- porous silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001020 plasma etching Methods 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 7
- 229910021426 porous silicon Inorganic materials 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- 238000005452 bending Methods 0.000 claims 1
- 238000010304 firing Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18488786U JPH0243868Y2 (enExample) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18488786U JPH0243868Y2 (enExample) | 1986-11-29 | 1986-11-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389969U true JPS6389969U (enExample) | 1988-06-10 |
| JPH0243868Y2 JPH0243868Y2 (enExample) | 1990-11-21 |
Family
ID=31132993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18488786U Expired JPH0243868Y2 (enExample) | 1986-11-29 | 1986-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243868Y2 (enExample) |
-
1986
- 1986-11-29 JP JP18488786U patent/JPH0243868Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0243868Y2 (enExample) | 1990-11-21 |
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