JPS57165032A - Purifying agent of high purity reagent and preparation thereof - Google Patents
Purifying agent of high purity reagent and preparation thereofInfo
- Publication number
- JPS57165032A JPS57165032A JP4864981A JP4864981A JPS57165032A JP S57165032 A JPS57165032 A JP S57165032A JP 4864981 A JP4864981 A JP 4864981A JP 4864981 A JP4864981 A JP 4864981A JP S57165032 A JPS57165032 A JP S57165032A
- Authority
- JP
- Japan
- Prior art keywords
- reagent
- purifying agent
- high purity
- purity reagent
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To obtain the easily handleable high capacity purifying agent by using a porous carrier having fine particle size silicone or the like held in fine pores thereof as the purifying agent of a high purity reagent.
CONSTITUTION: As the purifying agent of a high purity reagent, especially, a reagent used in a semiconductor element preparing process, one parpared by a method wherein a stock material monosilane 9 and a phophine gas 10 as a dorpant are introduced into a porous carrier 1 such as activated carbon or the like and fine particle size silicon or the like is held in fine pores of the carrier 1 by heating. This reagent contains silicon selectively adsorbing and removing a heavy metal ion, an alkali metal ion or the like in a reagent and has high capacity.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4864981A JPS57165032A (en) | 1981-04-01 | 1981-04-01 | Purifying agent of high purity reagent and preparation thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4864981A JPS57165032A (en) | 1981-04-01 | 1981-04-01 | Purifying agent of high purity reagent and preparation thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57165032A true JPS57165032A (en) | 1982-10-09 |
JPH0117736B2 JPH0117736B2 (en) | 1989-03-31 |
Family
ID=12809201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4864981A Granted JPS57165032A (en) | 1981-04-01 | 1981-04-01 | Purifying agent of high purity reagent and preparation thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57165032A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6015913A (en) * | 1983-07-08 | 1985-01-26 | Tokuyama Soda Co Ltd | Process of semiconductor substrate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52110289A (en) * | 1976-03-13 | 1977-09-16 | Ulvac Corp | Adsorbing matter with good heat conductivity and production thereof |
JPS5551436A (en) * | 1978-10-12 | 1980-04-15 | Kureha Chem Ind Co Ltd | Adsorbent |
-
1981
- 1981-04-01 JP JP4864981A patent/JPS57165032A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52110289A (en) * | 1976-03-13 | 1977-09-16 | Ulvac Corp | Adsorbing matter with good heat conductivity and production thereof |
JPS5551436A (en) * | 1978-10-12 | 1980-04-15 | Kureha Chem Ind Co Ltd | Adsorbent |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6015913A (en) * | 1983-07-08 | 1985-01-26 | Tokuyama Soda Co Ltd | Process of semiconductor substrate |
Also Published As
Publication number | Publication date |
---|---|
JPH0117736B2 (en) | 1989-03-31 |
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