JPS57165032A - Purifying agent of high purity reagent and preparation thereof - Google Patents

Purifying agent of high purity reagent and preparation thereof

Info

Publication number
JPS57165032A
JPS57165032A JP4864981A JP4864981A JPS57165032A JP S57165032 A JPS57165032 A JP S57165032A JP 4864981 A JP4864981 A JP 4864981A JP 4864981 A JP4864981 A JP 4864981A JP S57165032 A JPS57165032 A JP S57165032A
Authority
JP
Japan
Prior art keywords
reagent
purifying agent
high purity
purity reagent
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4864981A
Other languages
Japanese (ja)
Other versions
JPH0117736B2 (en
Inventor
Atsushi Yusa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP4864981A priority Critical patent/JPS57165032A/en
Publication of JPS57165032A publication Critical patent/JPS57165032A/en
Publication of JPH0117736B2 publication Critical patent/JPH0117736B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To obtain the easily handleable high capacity purifying agent by using a porous carrier having fine particle size silicone or the like held in fine pores thereof as the purifying agent of a high purity reagent.
CONSTITUTION: As the purifying agent of a high purity reagent, especially, a reagent used in a semiconductor element preparing process, one parpared by a method wherein a stock material monosilane 9 and a phophine gas 10 as a dorpant are introduced into a porous carrier 1 such as activated carbon or the like and fine particle size silicon or the like is held in fine pores of the carrier 1 by heating. This reagent contains silicon selectively adsorbing and removing a heavy metal ion, an alkali metal ion or the like in a reagent and has high capacity.
COPYRIGHT: (C)1982,JPO&Japio
JP4864981A 1981-04-01 1981-04-01 Purifying agent of high purity reagent and preparation thereof Granted JPS57165032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4864981A JPS57165032A (en) 1981-04-01 1981-04-01 Purifying agent of high purity reagent and preparation thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4864981A JPS57165032A (en) 1981-04-01 1981-04-01 Purifying agent of high purity reagent and preparation thereof

Publications (2)

Publication Number Publication Date
JPS57165032A true JPS57165032A (en) 1982-10-09
JPH0117736B2 JPH0117736B2 (en) 1989-03-31

Family

ID=12809201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4864981A Granted JPS57165032A (en) 1981-04-01 1981-04-01 Purifying agent of high purity reagent and preparation thereof

Country Status (1)

Country Link
JP (1) JPS57165032A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015913A (en) * 1983-07-08 1985-01-26 Tokuyama Soda Co Ltd Process of semiconductor substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52110289A (en) * 1976-03-13 1977-09-16 Ulvac Corp Adsorbing matter with good heat conductivity and production thereof
JPS5551436A (en) * 1978-10-12 1980-04-15 Kureha Chem Ind Co Ltd Adsorbent

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52110289A (en) * 1976-03-13 1977-09-16 Ulvac Corp Adsorbing matter with good heat conductivity and production thereof
JPS5551436A (en) * 1978-10-12 1980-04-15 Kureha Chem Ind Co Ltd Adsorbent

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015913A (en) * 1983-07-08 1985-01-26 Tokuyama Soda Co Ltd Process of semiconductor substrate

Also Published As

Publication number Publication date
JPH0117736B2 (en) 1989-03-31

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