JPS6389242U - - Google Patents
Info
- Publication number
- JPS6389242U JPS6389242U JP18376086U JP18376086U JPS6389242U JP S6389242 U JPS6389242 U JP S6389242U JP 18376086 U JP18376086 U JP 18376086U JP 18376086 U JP18376086 U JP 18376086U JP S6389242 U JPS6389242 U JP S6389242U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- semiconductor manufacturing
- transported
- transport mechanism
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 230000007723 transport mechanism Effects 0.000 claims description 6
- 230000032258 transport Effects 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 1
Landscapes
- Load-Engaging Elements For Cranes (AREA)
- Special Conveying (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18376086U JPH0528770Y2 (sl) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18376086U JPH0528770Y2 (sl) | 1986-12-01 | 1986-12-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389242U true JPS6389242U (sl) | 1988-06-10 |
| JPH0528770Y2 JPH0528770Y2 (sl) | 1993-07-23 |
Family
ID=31130797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18376086U Expired - Lifetime JPH0528770Y2 (sl) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528770Y2 (sl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007040062A1 (ja) * | 2005-10-04 | 2007-04-12 | Hitachi Kokusai Electric Inc. | 基板処理装置および半導体装置の製造方法 |
-
1986
- 1986-12-01 JP JP18376086U patent/JPH0528770Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007040062A1 (ja) * | 2005-10-04 | 2007-04-12 | Hitachi Kokusai Electric Inc. | 基板処理装置および半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528770Y2 (sl) | 1993-07-23 |
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