JPS6389232U - - Google Patents

Info

Publication number
JPS6389232U
JPS6389232U JP18426986U JP18426986U JPS6389232U JP S6389232 U JPS6389232 U JP S6389232U JP 18426986 U JP18426986 U JP 18426986U JP 18426986 U JP18426986 U JP 18426986U JP S6389232 U JPS6389232 U JP S6389232U
Authority
JP
Japan
Prior art keywords
reaction tube
holder
compound semiconductor
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18426986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18426986U priority Critical patent/JPS6389232U/ja
Publication of JPS6389232U publication Critical patent/JPS6389232U/ja
Pending legal-status Critical Current

Links

JP18426986U 1986-11-28 1986-11-28 Pending JPS6389232U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18426986U JPS6389232U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18426986U JPS6389232U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6389232U true JPS6389232U (enrdf_load_stackoverflow) 1988-06-10

Family

ID=31131784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18426986U Pending JPS6389232U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6389232U (enrdf_load_stackoverflow)

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