JPS61176259U - - Google Patents

Info

Publication number
JPS61176259U
JPS61176259U JP5812585U JP5812585U JPS61176259U JP S61176259 U JPS61176259 U JP S61176259U JP 5812585 U JP5812585 U JP 5812585U JP 5812585 U JP5812585 U JP 5812585U JP S61176259 U JPS61176259 U JP S61176259U
Authority
JP
Japan
Prior art keywords
cvd
workpiece
reaction vessel
cvd apparatus
support seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5812585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5812585U priority Critical patent/JPS61176259U/ja
Publication of JPS61176259U publication Critical patent/JPS61176259U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP5812585U 1985-04-18 1985-04-18 Pending JPS61176259U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5812585U JPS61176259U (enrdf_load_stackoverflow) 1985-04-18 1985-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5812585U JPS61176259U (enrdf_load_stackoverflow) 1985-04-18 1985-04-18

Publications (1)

Publication Number Publication Date
JPS61176259U true JPS61176259U (enrdf_load_stackoverflow) 1986-11-04

Family

ID=30583327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5812585U Pending JPS61176259U (enrdf_load_stackoverflow) 1985-04-18 1985-04-18

Country Status (1)

Country Link
JP (1) JPS61176259U (enrdf_load_stackoverflow)

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