JPS63165842U - - Google Patents

Info

Publication number
JPS63165842U
JPS63165842U JP5892987U JP5892987U JPS63165842U JP S63165842 U JPS63165842 U JP S63165842U JP 5892987 U JP5892987 U JP 5892987U JP 5892987 U JP5892987 U JP 5892987U JP S63165842 U JPS63165842 U JP S63165842U
Authority
JP
Japan
Prior art keywords
substrate
platinum
wafer holder
gold alloy
substrate support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5892987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5892987U priority Critical patent/JPS63165842U/ja
Publication of JPS63165842U publication Critical patent/JPS63165842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5892987U 1987-04-17 1987-04-17 Pending JPS63165842U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5892987U JPS63165842U (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5892987U JPS63165842U (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Publications (1)

Publication Number Publication Date
JPS63165842U true JPS63165842U (enrdf_load_stackoverflow) 1988-10-28

Family

ID=30889947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5892987U Pending JPS63165842U (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Country Status (1)

Country Link
JP (1) JPS63165842U (enrdf_load_stackoverflow)

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