JPS61158946U - - Google Patents

Info

Publication number
JPS61158946U
JPS61158946U JP4223885U JP4223885U JPS61158946U JP S61158946 U JPS61158946 U JP S61158946U JP 4223885 U JP4223885 U JP 4223885U JP 4223885 U JP4223885 U JP 4223885U JP S61158946 U JPS61158946 U JP S61158946U
Authority
JP
Japan
Prior art keywords
susceptor
wafer
vapor phase
growth apparatus
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4223885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4223885U priority Critical patent/JPS61158946U/ja
Publication of JPS61158946U publication Critical patent/JPS61158946U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4223885U 1985-03-23 1985-03-23 Pending JPS61158946U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4223885U JPS61158946U (enrdf_load_stackoverflow) 1985-03-23 1985-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4223885U JPS61158946U (enrdf_load_stackoverflow) 1985-03-23 1985-03-23

Publications (1)

Publication Number Publication Date
JPS61158946U true JPS61158946U (enrdf_load_stackoverflow) 1986-10-02

Family

ID=30552806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4223885U Pending JPS61158946U (enrdf_load_stackoverflow) 1985-03-23 1985-03-23

Country Status (1)

Country Link
JP (1) JPS61158946U (enrdf_load_stackoverflow)

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