JPS6312829U - - Google Patents

Info

Publication number
JPS6312829U
JPS6312829U JP10615386U JP10615386U JPS6312829U JP S6312829 U JPS6312829 U JP S6312829U JP 10615386 U JP10615386 U JP 10615386U JP 10615386 U JP10615386 U JP 10615386U JP S6312829 U JPS6312829 U JP S6312829U
Authority
JP
Japan
Prior art keywords
wafer
stand
vapor phase
phase growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10615386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10615386U priority Critical patent/JPS6312829U/ja
Publication of JPS6312829U publication Critical patent/JPS6312829U/ja
Pending legal-status Critical Current

Links

JP10615386U 1986-07-10 1986-07-10 Pending JPS6312829U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10615386U JPS6312829U (enrdf_load_stackoverflow) 1986-07-10 1986-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10615386U JPS6312829U (enrdf_load_stackoverflow) 1986-07-10 1986-07-10

Publications (1)

Publication Number Publication Date
JPS6312829U true JPS6312829U (enrdf_load_stackoverflow) 1988-01-27

Family

ID=30981253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10615386U Pending JPS6312829U (enrdf_load_stackoverflow) 1986-07-10 1986-07-10

Country Status (1)

Country Link
JP (1) JPS6312829U (enrdf_load_stackoverflow)

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