JPS63183266U - - Google Patents

Info

Publication number
JPS63183266U
JPS63183266U JP7298487U JP7298487U JPS63183266U JP S63183266 U JPS63183266 U JP S63183266U JP 7298487 U JP7298487 U JP 7298487U JP 7298487 U JP7298487 U JP 7298487U JP S63183266 U JPS63183266 U JP S63183266U
Authority
JP
Japan
Prior art keywords
tube
process tube
workpiece
reaction gas
inner tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7298487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7298487U priority Critical patent/JPS63183266U/ja
Publication of JPS63183266U publication Critical patent/JPS63183266U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7298487U 1987-05-18 1987-05-18 Pending JPS63183266U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7298487U JPS63183266U (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7298487U JPS63183266U (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Publications (1)

Publication Number Publication Date
JPS63183266U true JPS63183266U (enrdf_load_stackoverflow) 1988-11-25

Family

ID=30916918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7298487U Pending JPS63183266U (enrdf_load_stackoverflow) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPS63183266U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6252200A (ja) * 1985-08-28 1987-03-06 Nec Corp 気相エピタキシヤル成長装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6252200A (ja) * 1985-08-28 1987-03-06 Nec Corp 気相エピタキシヤル成長装置

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