JPS6389228U - - Google Patents
Info
- Publication number
- JPS6389228U JPS6389228U JP18443086U JP18443086U JPS6389228U JP S6389228 U JPS6389228 U JP S6389228U JP 18443086 U JP18443086 U JP 18443086U JP 18443086 U JP18443086 U JP 18443086U JP S6389228 U JPS6389228 U JP S6389228U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- epitaxial growth
- molecular beam
- beam epitaxial
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000010586 diagram Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18443086U JPH034024Y2 (enrdf_load_html_response) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18443086U JPH034024Y2 (enrdf_load_html_response) | 1986-11-29 | 1986-11-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6389228U true JPS6389228U (enrdf_load_html_response) | 1988-06-10 |
| JPH034024Y2 JPH034024Y2 (enrdf_load_html_response) | 1991-02-01 |
Family
ID=31132095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18443086U Expired JPH034024Y2 (enrdf_load_html_response) | 1986-11-29 | 1986-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034024Y2 (enrdf_load_html_response) |
-
1986
- 1986-11-29 JP JP18443086U patent/JPH034024Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034024Y2 (enrdf_load_html_response) | 1991-02-01 |
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