JPS638903Y2 - - Google Patents
Info
- Publication number
- JPS638903Y2 JPS638903Y2 JP1984045901U JP4590184U JPS638903Y2 JP S638903 Y2 JPS638903 Y2 JP S638903Y2 JP 1984045901 U JP1984045901 U JP 1984045901U JP 4590184 U JP4590184 U JP 4590184U JP S638903 Y2 JPS638903 Y2 JP S638903Y2
- Authority
- JP
- Japan
- Prior art keywords
- frame
- arm
- substrate
- arms
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984045901U JPS60159435U (ja) | 1984-03-31 | 1984-03-31 | 基板保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984045901U JPS60159435U (ja) | 1984-03-31 | 1984-03-31 | 基板保持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60159435U JPS60159435U (ja) | 1985-10-23 |
| JPS638903Y2 true JPS638903Y2 (enrdf_load_stackoverflow) | 1988-03-16 |
Family
ID=30559798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984045901U Granted JPS60159435U (ja) | 1984-03-31 | 1984-03-31 | 基板保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60159435U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7667822B2 (en) * | 2006-02-14 | 2010-02-23 | Asml Netherlands B.V. | Lithographic apparatus and stage apparatus |
| JP5609089B2 (ja) * | 2009-12-08 | 2014-10-22 | 凸版印刷株式会社 | フォトマスク洗浄装置及び方法 |
-
1984
- 1984-03-31 JP JP1984045901U patent/JPS60159435U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60159435U (ja) | 1985-10-23 |