JPS6387723A - Bubbler container - Google Patents

Abstract

PURPOSE:To facilitate exhausting the air which flows into a bubbler container when the bubbler container is replaced by a method wherein three-way valves are provided in respective pipes for flowing-in and flowing-out of gas and each one end of three-way valves are connected to each other. CONSTITUTION:Three-way valves 14 and 15 are provided near a bubbler 5 in pipes 16 and 17 which connect switching valves 3 and 4 to the flow inlet 5-1 and the flow outlet 5-2 of the bubbler 5 and each one end of the three-way valves 14 and 15 are connected to each other. Therefore, an air exhaust route composed of a joint 1a-the switching valve 3-the three-way valve 14-the three- way valve 15-the switching valve 4-a joint 2a is formed. By discharging gas from a gas flowing-in apparatus into the formed air exhaust route, also the air staying between the joints 1a and 2a and the switching valves 3 and 4 can be exhausted out easily.

Description

[Detailed Description of the Invention] [Summary] In order to prevent air from entering when replacing a bubbler container used for semiconductor vapor phase epitaxial growth, the present invention provides a valve for opening and closing the container, as well as a valve for gas inflow and outflow of the container. A three-way valve is provided on each side, and these are connected to remove air stagnant inside.

[Industrial application field]

The present invention relates to improvements in bubbler containers used for vapor phase epitaxial growth of semiconductors.

In the vapor phase epitaxial growth of semiconductors, phosphorus oxychloride <p
oc > and other chlorine compounds and trimethylgallium (T
Organic metals such as MG) are used. These are liquids at room temperature, and saturated vapor is obtained by passing a carrier gas such as hydrogen and used as a gas, and a bubbler container is used to produce this gas.

When replacing such a bubbler container, air flowing in from the outside stays in the piping, and the oxygen in the air oxidizes poc13 and TMG stored in the bubbler, making it impossible to obtain a high-quality epitaxial film. Become. Therefore, there is a need for a bubbler container having a structure that can easily remove the air accumulated in the piping.

[Conventional technology]

FIG. 4 is a schematic diagram of a conventional bubbler container, and FIG. 5 is a schematic diagram for explaining the operation of the conventional bubbler container.

In Figure 4, conventional bubbler containers include pocZ3 and T.
The bubbler 5 that stores the MG liquid material 6, the pipes 16 and 17 connected to the inlet 5-1 and the outlet 5-2 of the bubbler 5, and the pipes 16 and 17 are opened.

It is comprised of on-off valves 3 and 4 that close, and joints 1a and 2a provided at the input and output ends of the on-off valves 3 and 4 via piping.

As shown in FIG. 5, this bubbler container is connected to fittings 1b and 2b corresponding to fittings 1a and 2a, and connected to piping and air-operated valves 7 and 8, respectively, with air-operated valve 7 provided externally. The gas inlet device (not shown) and the air-operated valve 8 are connected to a vapor phase epitaxial growth device (not shown). Furthermore, an air-operated valve 9 is provided between the joints 1b and 2b.

Now, when replacing the bubbler container in a natural environment, when connecting the joints 1a and Ib and the joints 2a and 2b, respectively, and connecting the gas inflow device and vapor phase epitaxial growth device provided outside to the bubbler 6, Air flows into the pipe from each joint.

In this case, the on-off valves 3 and 4 are closed and air is prevented from flowing into the bubbler 5, but there is no air in the piping between the air-operated valves 7 and 8 and the on-off valves 3 and 4. will flow in.

Therefore, in order to remove the air that has entered the pipe, an air-operated valve is installed as shown in Figure 5. , 8.9 is opened, the gas flows out from the gas inflow machine and passes through the circuit shown by the solid line arrow, and the air stagnant in the circuit is discharged to the outside.

After the above air removal is completed, the air-operated valve 9 is closed,
The on-off valves 3 and 4 are opened to form a circuit shown by the dotted line arrow in FIG. The TMG liquid material 6 is taken out as a gas and vapor phase epitaxial growth is performed.

[Problem that the invention seeks to solve]

In the above air release method, since the carrier gas does not flow between the joints 1a and 2b and the on-off valves 3 and 4, there is a drawback that the air remaining in the pipes between them cannot be easily released.

If vapor phase epitaxial growth is performed while this air remains stagnant, the liquid material 6 stored in the bubbler 5 will be oxidized by oxygen in the air, resulting in a problem that a good quality epitaxial film cannot be obtained.

The present invention was created in view of these points, and an object of the present invention is to provide a bubbler container having a structure that allows air flowing into the container to be easily released to the outside when the bubbler container is replaced. There is.

[Means for solving problems]

In order to solve the above problems, the on-off valves 3 and 4 are connected to the inlet 5-1 and outlet 5-2 of the bubbler 5, as shown in the schematic diagram of the bubbler container of the present invention in FIG. Three-way pulps 14 and 15 are provided in the pipes 16 and 17 near the bubbler 5, respectively, and one ends of both three-way valves are connected.

As a result, the joint 1 as shown by the solid arrow in FIG.
b,],]a-opening/closing valve 3-three-way valve 14 three-way valve 15-opening/closing valve 4-joints 2a, 2b form an air release circuit.

[Effect]

By releasing gas from the gas inflow device and passing the gas through the air release circuit formed above, the air that remains between the joints 1a and 2b and the on-off valves 3 and 4, which has been a problem in the past, can be easily released to the outside. can be released.

〔Example〕

FIG. 2 is a schematic diagram for explaining the air release operation of a bubbler container according to an embodiment of the present invention, and FIG. 3 is a schematic diagram for explaining the vapor phase epitaxial growth operation of a bubbler container according to an embodiment. For ease of explanation, the same parts as in FIGS. 4 and 5 are indicated by the same reference numerals.

As shown in FIGS. 2 and 3, the bubbler container of one embodiment includes a bubbler 5 that stores a liquid material 6, a pipe 16 connected to an inlet 5-1 and an outlet 5-2 of the bubbler 5, and 17, on-off valves 3 and 4 that open and close the pipes 16 and 17, and joints 1a and 2a provided at the input and output ends of the on-off valves 3 and 4 via the pipes.
and on-off valves 3 and 4 and a bubbler 5.
Piping 1 connecting the inlet 5-1 and outlet 5-2 of
Three-way valves 14 and 15 are provided at portions 6 and 17 near the bubbler 5, respectively, and one ends of both three-way valves are connected.

This bubbler container is connected to joints 1b and 2b corresponding to joints 1a and 2a, and connected to piping and air-operated valves 7 and 8, respectively, and air-operated valve 7 is connected to an externally provided gas inflow device (not shown). The air-operated valve 8 is connected to a vapor phase epitaxial growth apparatus (not shown). Additionally, an air-operated valve 9 is provided between the joints 1b and 2b.

The air releasing operation of the bubbler container of one embodiment will be explained with reference to FIG.

When air is released, the three-way valves 14 and 15 are in a connected state, the on-off valve 3.4 and the air-operated valve 7.8 are open, and the air-operated valve 9 is closed, and the air-operated valve 7-joint is closed as shown by the solid arrow. 1b, 1a - Opening/closing valve 3 - Three-way valve 14 - Three-way valve 15 - Opening/closing valve 4 - Joints 2a, 2
b- An air release circuit of the air-operated valve 8 is formed.

Now, by discharging gas from the gas discharging device and passing it through the formed air discharging circuit, the air in the piping of the air discharging circuit is discharged to the outside together with the gas.

The vapor phase epitaxial growth operation of a bubbler container in one embodiment will be explained with reference to FIG.

In Figure 3, the connection between three-way valves 14 and 15 is disconnected;
The on-off valves 3 and 4 and the air-operated valve 7°8 are open, and the air-operated valve 9 is closed, as shown by the dotted arrow, the air-operated valve 7-11! Hand 1b, la - Open/close valve 3
A vapor phase epitaxial growth circuit of - three-way valve 14 - bubbler 5 - three-way valve 15 - opening/closing valve 4 - joints 2a, 2b - air-operated valve 8 is formed.

Carrier gas such as hydrogen sent out from the gas outflow device passes through the vapor phase epitaxial growth circuit and reaches the bubbler 5, as shown by the dotted line arrow in Figure 3, and the liquid of POC173 and TMG stored in the bubbler 5. The material 6 is taken out as a gas and vapor phase epitaxial growth is performed.

〔Effect of the invention〕

As explained above, according to the present invention, three-way valves are provided in the bubbler near the person and the output end, and one end of both the three-way valves are connected, so that when the bubbler container is replaced, the container is removed. It becomes possible to easily release the air accumulated in the pipe to the outside, and high-quality vapor phase epitaxial growth can be performed.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of a bubbler container of the present invention, Fig. 2 is a schematic diagram for explaining the air release operation of a bubbler container of an embodiment of the invention, and Fig. 3 is a schematic diagram of a bubbler container of an embodiment of the invention. FIG. 4 is a schematic diagram for explaining the operation of phase epitaxial growth, FIG. 4 is a schematic diagram of a conventional bubbler container, and FIG. 5 is a schematic diagram for explaining the operation of a conventional bubbler container. In the figure, 1a, 1b, 2a, 2b are joints, 3.4 is an on-off valve, 5 is a bubbler, 5-1 and 5-2 are inlets and outlets of the bubbler, 6 is a liquid material, 7,8°9 14.15 shows a three-way valve, and 16.17 shows a pipe. -Compassion pfJq/Zuburame; Kiyan, ffl, Book G Epta Dynasty Sha 1 ~ 1 trt 1 Story Melting - Greetings, Figure 3, 1 Figure 1

Claims (1)

[Claims] A bubbler (5) that stores a liquid material (6), and a bubbler (5) that stores a liquid material (6);
5) for gas inflow and gas outflow piping (16, 17)
), each of the gas inflow and outflow pipes (16, 17) is provided with a three-way valve (1
4, 15), and one ends of both the three-way valves (14, 15) are connected.