JPS6385403A - 厚膜回路形成装置における基板高さ測定装置 - Google Patents

厚膜回路形成装置における基板高さ測定装置

Info

Publication number
JPS6385403A
JPS6385403A JP61233593A JP23359386A JPS6385403A JP S6385403 A JPS6385403 A JP S6385403A JP 61233593 A JP61233593 A JP 61233593A JP 23359386 A JP23359386 A JP 23359386A JP S6385403 A JPS6385403 A JP S6385403A
Authority
JP
Japan
Prior art keywords
thick film
measuring device
film circuit
height measuring
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61233593A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0433363B2 (enrdf_load_stackoverflow
Inventor
Katsuhiko Taguchi
田口　克彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Juki Corp
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juki Corp filed Critical Juki Corp
Priority to JP61233593A priority Critical patent/JPS6385403A/ja
Publication of JPS6385403A publication Critical patent/JPS6385403A/ja
Publication of JPH0433363B2 publication Critical patent/JPH0433363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP61233593A 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置 Granted JPS6385403A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61233593A JPS6385403A (ja) 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61233593A JPS6385403A (ja) 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置

Publications (2)

Publication Number Publication Date
JPS6385403A true JPS6385403A (ja) 1988-04-15
JPH0433363B2 JPH0433363B2 (enrdf_load_stackoverflow) 1992-06-02

Family

ID=16957489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61233593A Granted JPS6385403A (ja) 1986-09-30 1986-09-30 厚膜回路形成装置における基板高さ測定装置

Country Status (1)

Country Link
JP (1) JPS6385403A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252742A (ja) * 1988-08-17 1990-02-22 Hitachi Techno Eng Co Ltd スクリーンレスパターン描画装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0252742A (ja) * 1988-08-17 1990-02-22 Hitachi Techno Eng Co Ltd スクリーンレスパターン描画装置

Also Published As

Publication number Publication date
JPH0433363B2 (enrdf_load_stackoverflow) 1992-06-02

Similar Documents

Publication Publication Date Title
EP0179917B1 (en) Method and apparatus for drawing thick-film circuits
US4435616A (en) Graphical data entry apparatus
US5793128A (en) Encoder and motor with an encoder
KR20010074937A (ko) 전기 어셈블리 및 보정 기판을 제조하기 위한 디바이스에서 홀딩 장치의 이동 경로 및/또는 각도 위치를 보정하기 위한 방법 및 장치
EP0204701A1 (en) Method and apparatus for calibrating a positioning system
US20100026994A1 (en) Reflection optical sensor for determining the angular position of a rotating element
JPH021197A (ja) 描画装置
JPS6385403A (ja) 厚膜回路形成装置における基板高さ測定装置
JPH07297240A (ja) Ｌｃｄ検査プローブの位置合せ方式及び装置
JPS60218853A (ja) ウエーハ前整列装置
US4604892A (en) Device for the automatic contactless measurement of the volume of a layer deposited on a substrate
JP4251742B2 (ja) レーザ加工装置
US7414738B2 (en) Measuring device for measuring the degree of transmission of a coating
JPH11183111A (ja) 膜厚変化の測定方法とその装置
US20020097371A1 (en) Position sensing device
JPH0835832A (ja) 板厚測定装置
GB1570954A (en) Micromeasuring device
JPH02298095A (ja) 直接描画装置における基板表面計測方法
JPH04127506U (ja) 位置検出機構
JPS63133694A (ja) 厚膜回路形成における回路不良検出方法
CN100422780C (zh) 光学元件、制造这种光学元件的方法、以及对齐光束与这种光学元件的方法
JPH0486539A (ja) 光ビーム径の測定装置
JP2001153640A (ja) プリント基板検査装置
JPH02181494A (ja) 描画装置
KR960005482B1 (ko) 캠코더용 줌렌즈의 위치 검출장치