JPS6384934U - - Google Patents
Info
- Publication number
- JPS6384934U JPS6384934U JP17924486U JP17924486U JPS6384934U JP S6384934 U JPS6384934 U JP S6384934U JP 17924486 U JP17924486 U JP 17924486U JP 17924486 U JP17924486 U JP 17924486U JP S6384934 U JPS6384934 U JP S6384934U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- reflected light
- exposure
- base substrate
- monitor section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17924486U JPS6384934U (US06653308-20031125-C00199.png) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17924486U JPS6384934U (US06653308-20031125-C00199.png) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384934U true JPS6384934U (US06653308-20031125-C00199.png) | 1988-06-03 |
Family
ID=31122134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17924486U Pending JPS6384934U (US06653308-20031125-C00199.png) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384934U (US06653308-20031125-C00199.png) |
-
1986
- 1986-11-20 JP JP17924486U patent/JPS6384934U/ja active Pending
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