JPS6382932U - - Google Patents
Info
- Publication number
- JPS6382932U JPS6382932U JP17671186U JP17671186U JPS6382932U JP S6382932 U JPS6382932 U JP S6382932U JP 17671186 U JP17671186 U JP 17671186U JP 17671186 U JP17671186 U JP 17671186U JP S6382932 U JPS6382932 U JP S6382932U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- electric heater
- processing tube
- outer periphery
- wound around
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17671186U JPS6382932U (oth) | 1986-11-19 | 1986-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17671186U JPS6382932U (oth) | 1986-11-19 | 1986-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382932U true JPS6382932U (oth) | 1988-05-31 |
Family
ID=31117222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17671186U Pending JPS6382932U (oth) | 1986-11-19 | 1986-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382932U (oth) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020202619A1 (ja) * | 2019-03-29 | 2020-10-08 | Ｊｘ金属株式会社 | マルチシャンク型ヒーター |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60182728A (ja) * | 1984-02-29 | 1985-09-18 | Fujitsu Ltd | 縦型炉 |
-
1986
- 1986-11-19 JP JP17671186U patent/JPS6382932U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60182728A (ja) * | 1984-02-29 | 1985-09-18 | Fujitsu Ltd | 縦型炉 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020202619A1 (ja) * | 2019-03-29 | 2020-10-08 | Ｊｘ金属株式会社 | マルチシャンク型ヒーター |
| JPWO2020202619A1 (ja) * | 2019-03-29 | 2021-04-30 | Ｊｘ金属株式会社 | マルチシャンク型ヒーター |
| CN113170538A (zh) * | 2019-03-29 | 2021-07-23 | 捷客斯金属株式会社 | 多柄型加热器 |
| CN113170538B (zh) * | 2019-03-29 | 2023-03-14 | 捷客斯金属株式会社 | 多柄型加热器 |
| US11838998B2 (en) | 2019-03-29 | 2023-12-05 | Jx Metals Corporation | Multi-shank heater |
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