JPS6382931U - - Google Patents
Info
- Publication number
- JPS6382931U JPS6382931U JP17850186U JP17850186U JPS6382931U JP S6382931 U JPS6382931 U JP S6382931U JP 17850186 U JP17850186 U JP 17850186U JP 17850186 U JP17850186 U JP 17850186U JP S6382931 U JPS6382931 U JP S6382931U
- Authority
- JP
- Japan
- Prior art keywords
- base
- raw material
- suspended
- wafer holder
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17850186U JPS6382931U (enExample) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17850186U JPS6382931U (enExample) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382931U true JPS6382931U (enExample) | 1988-05-31 |
Family
ID=31120690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17850186U Pending JPS6382931U (enExample) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382931U (enExample) |
-
1986
- 1986-11-20 JP JP17850186U patent/JPS6382931U/ja active Pending