JPS6382931U - - Google Patents
Info
- Publication number
- JPS6382931U JPS6382931U JP1986178501U JP17850186U JPS6382931U JP S6382931 U JPS6382931 U JP S6382931U JP 1986178501 U JP1986178501 U JP 1986178501U JP 17850186 U JP17850186 U JP 17850186U JP S6382931 U JPS6382931 U JP S6382931U
- Authority
- JP
- Japan
- Prior art keywords
- base
- raw material
- suspended
- wafer holder
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986178501U JPS6382931U (enExample) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986178501U JPS6382931U (enExample) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6382931U true JPS6382931U (enExample) | 1988-05-31 |
Family
ID=31120690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986178501U Pending JPS6382931U (enExample) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382931U (enExample) |
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1986
- 1986-11-20 JP JP1986178501U patent/JPS6382931U/ja active Pending