JPH01157170U - - Google Patents
Info
- Publication number
- JPH01157170U JPH01157170U JP1988052109U JP5210988U JPH01157170U JP H01157170 U JPH01157170 U JP H01157170U JP 1988052109 U JP1988052109 U JP 1988052109U JP 5210988 U JP5210988 U JP 5210988U JP H01157170 U JPH01157170 U JP H01157170U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mounting table
- suspending
- fixing
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988052109U JPH01157170U (enExample) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988052109U JPH01157170U (enExample) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157170U true JPH01157170U (enExample) | 1989-10-30 |
Family
ID=31278117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988052109U Pending JPH01157170U (enExample) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157170U (enExample) |
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1988
- 1988-04-20 JP JP1988052109U patent/JPH01157170U/ja active Pending