JPH01147270U - - Google Patents
Info
- Publication number
- JPH01147270U JPH01147270U JP1988039627U JP3962788U JPH01147270U JP H01147270 U JPH01147270 U JP H01147270U JP 1988039627 U JP1988039627 U JP 1988039627U JP 3962788 U JP3962788 U JP 3962788U JP H01147270 U JPH01147270 U JP H01147270U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hanging frame
- substrate holder
- substrate holding
- disposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988039627U JPH01147270U (enExample) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988039627U JPH01147270U (enExample) | 1988-03-28 | 1988-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01147270U true JPH01147270U (enExample) | 1989-10-11 |
Family
ID=31266127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988039627U Pending JPH01147270U (enExample) | 1988-03-28 | 1988-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01147270U (enExample) |
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1988
- 1988-03-28 JP JP1988039627U patent/JPH01147270U/ja active Pending