JPS6382312A - 膜厚測定方法 - Google Patents
膜厚測定方法Info
- Publication number
- JPS6382312A JPS6382312A JP22728786A JP22728786A JPS6382312A JP S6382312 A JPS6382312 A JP S6382312A JP 22728786 A JP22728786 A JP 22728786A JP 22728786 A JP22728786 A JP 22728786A JP S6382312 A JPS6382312 A JP S6382312A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- ultrasonic
- ultrasonic waves
- film thickness
- ultrasound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22728786A JPS6382312A (ja) | 1986-09-26 | 1986-09-26 | 膜厚測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22728786A JPS6382312A (ja) | 1986-09-26 | 1986-09-26 | 膜厚測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6382312A true JPS6382312A (ja) | 1988-04-13 |
| JPH0367569B2 JPH0367569B2 (cg-RX-API-DMAC7.html) | 1991-10-23 |
Family
ID=16858447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22728786A Granted JPS6382312A (ja) | 1986-09-26 | 1986-09-26 | 膜厚測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382312A (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0241109U (cg-RX-API-DMAC7.html) * | 1988-09-12 | 1990-03-22 | ||
| US7040170B2 (en) * | 2003-08-21 | 2006-05-09 | Murata Manufacturing Co., Ltd. | Methods for measuring strength of film and determining quality of object having the film |
| JP2010243176A (ja) * | 2009-04-01 | 2010-10-28 | Kanto Auto Works Ltd | 膜厚測定方法及び測定装置 |
-
1986
- 1986-09-26 JP JP22728786A patent/JPS6382312A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0241109U (cg-RX-API-DMAC7.html) * | 1988-09-12 | 1990-03-22 | ||
| US7040170B2 (en) * | 2003-08-21 | 2006-05-09 | Murata Manufacturing Co., Ltd. | Methods for measuring strength of film and determining quality of object having the film |
| JP2010243176A (ja) * | 2009-04-01 | 2010-10-28 | Kanto Auto Works Ltd | 膜厚測定方法及び測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0367569B2 (cg-RX-API-DMAC7.html) | 1991-10-23 |
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