JPS6378067U - - Google Patents
Info
- Publication number
- JPS6378067U JPS6378067U JP17381886U JP17381886U JPS6378067U JP S6378067 U JPS6378067 U JP S6378067U JP 17381886 U JP17381886 U JP 17381886U JP 17381886 U JP17381886 U JP 17381886U JP S6378067 U JPS6378067 U JP S6378067U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- evaporation source
- crystal resonator
- vacuum
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17381886U JPS6378067U (enExample) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17381886U JPS6378067U (enExample) | 1986-11-12 | 1986-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6378067U true JPS6378067U (enExample) | 1988-05-24 |
Family
ID=31111638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17381886U Pending JPS6378067U (enExample) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378067U (enExample) |
-
1986
- 1986-11-12 JP JP17381886U patent/JPS6378067U/ja active Pending
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